MOS devices Radiation effects Absorbed dose Aluminum Analytic expressions Atomic layer deposited Atomic layer deposition C-V curve C-V measurement Capacitance-voltage techniques Capacitive structure Comparative analysis Constant capacitance Dielectric materials Dosimetry Electrical characteristic Electron trap density Electron traps Error compensation Experimental data Experimental evidence High-K gate dielectrics High-k dielectric High-k gate dielectrics Insulating layers Interface traps Ionizing radiation Irradiation MOS capacitors Main effect