Absorbed dose Aluminum Analytic expressions Atomic layer deposited Atomic layer deposition C-V measurement Capacitance-voltage techniques Constant capacitance Dosimetry Electrical characteristic Electron trap density Electron traps Error compensation Experimental data Experimental evidence Insulating layers Interface traps Ionizing radiation Irradiation MOS capacitors MOS devices Main effect Metal oxide semiconductor Metallic compounds Non-volatile memories Non-volatile memory application Physical model Radiation effects Radiation shielding Semiconductor devices