Tuning the resistive switching properties of TiO2-x films
We study the electrical characteristics of TiO2-x-based resistive switching devices fabricated with different oxygen/argon flow ratio during the oxide thin film sputtering deposition. Upon minute changes in this fabrication parameter, three qualitatively different device characteristics were accesse...
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todo:paper_00036951_v106_n12_p_Ghenzi2023-10-03T13:56:33Z Tuning the resistive switching properties of TiO2-x films Ghenzi, N. Rozenberg, M.J. Llopis, R. Levy, P. Hueso, L.E. Stoliar, P. Deposition Oxygen Switching Switching systems Temperature distribution Conductive filaments Device characteristics Electrical characteristic Fabrication parameters Oxygen vacancy concentration Resistive switching behaviors Resistive switching devices Temperature dependence Oxygen vacancies We study the electrical characteristics of TiO2-x-based resistive switching devices fabricated with different oxygen/argon flow ratio during the oxide thin film sputtering deposition. Upon minute changes in this fabrication parameter, three qualitatively different device characteristics were accessed in the same system, namely, standard bipolar resistive switching, electroforming-free devices, and devices with multi-step breakdown. We propose that small variations in the oxygen/ argon flow ratio result in relevant changes of the oxygen vacancy concentration, which is the key parameter determining the resistive switching behavior. The coexistence of percolative or non-percolative conductive filaments is also discussed. Finally, the hypothesis is verified by means of the temperature dependence of the devices in low resistance state. © 2015 AIP Publishing LLC. Fil:Rozenberg, M.J. Universidad de Buenos Aires. Facultad de Ciencias Exactas y Naturales; Argentina. Fil:Levy, P. Universidad de Buenos Aires. Facultad de Ciencias Exactas y Naturales; Argentina. JOUR info:eu-repo/semantics/openAccess http://creativecommons.org/licenses/by/2.5/ar http://hdl.handle.net/20.500.12110/paper_00036951_v106_n12_p_Ghenzi |
institution |
Universidad de Buenos Aires |
institution_str |
I-28 |
repository_str |
R-134 |
collection |
Biblioteca Digital - Facultad de Ciencias Exactas y Naturales (UBA) |
topic |
Deposition Oxygen Switching Switching systems Temperature distribution Conductive filaments Device characteristics Electrical characteristic Fabrication parameters Oxygen vacancy concentration Resistive switching behaviors Resistive switching devices Temperature dependence Oxygen vacancies |
spellingShingle |
Deposition Oxygen Switching Switching systems Temperature distribution Conductive filaments Device characteristics Electrical characteristic Fabrication parameters Oxygen vacancy concentration Resistive switching behaviors Resistive switching devices Temperature dependence Oxygen vacancies Ghenzi, N. Rozenberg, M.J. Llopis, R. Levy, P. Hueso, L.E. Stoliar, P. Tuning the resistive switching properties of TiO2-x films |
topic_facet |
Deposition Oxygen Switching Switching systems Temperature distribution Conductive filaments Device characteristics Electrical characteristic Fabrication parameters Oxygen vacancy concentration Resistive switching behaviors Resistive switching devices Temperature dependence Oxygen vacancies |
description |
We study the electrical characteristics of TiO2-x-based resistive switching devices fabricated with different oxygen/argon flow ratio during the oxide thin film sputtering deposition. Upon minute changes in this fabrication parameter, three qualitatively different device characteristics were accessed in the same system, namely, standard bipolar resistive switching, electroforming-free devices, and devices with multi-step breakdown. We propose that small variations in the oxygen/ argon flow ratio result in relevant changes of the oxygen vacancy concentration, which is the key parameter determining the resistive switching behavior. The coexistence of percolative or non-percolative conductive filaments is also discussed. Finally, the hypothesis is verified by means of the temperature dependence of the devices in low resistance state. © 2015 AIP Publishing LLC. |
format |
JOUR |
author |
Ghenzi, N. Rozenberg, M.J. Llopis, R. Levy, P. Hueso, L.E. Stoliar, P. |
author_facet |
Ghenzi, N. Rozenberg, M.J. Llopis, R. Levy, P. Hueso, L.E. Stoliar, P. |
author_sort |
Ghenzi, N. |
title |
Tuning the resistive switching properties of TiO2-x films |
title_short |
Tuning the resistive switching properties of TiO2-x films |
title_full |
Tuning the resistive switching properties of TiO2-x films |
title_fullStr |
Tuning the resistive switching properties of TiO2-x films |
title_full_unstemmed |
Tuning the resistive switching properties of TiO2-x films |
title_sort |
tuning the resistive switching properties of tio2-x films |
url |
http://hdl.handle.net/20.500.12110/paper_00036951_v106_n12_p_Ghenzi |
work_keys_str_mv |
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_version_ |
1782030691064610816 |