Characterization of titanium films deposited with a cathodic arc using a straight magnetic duct

Nanostructured Ti films were obtained employing a cathodic arc with a straight magnetic filter. The films were characterized using X-ray diffraction, scanning electron and atomic force microscopy. The films were found to be dense and with columnar grains, whose size increased with the exposure time....

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Autores principales: Bermeo, F., Torre, H.D., Kleiman, A., Minotti, F., Marquez, A.
Formato: CONF
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Acceso en línea:http://hdl.handle.net/20.500.12110/paper_17426588_v511_n1_p_Bermeo
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