Characterization of titanium films deposited with a cathodic arc using a straight magnetic duct
Nanostructured Ti films were obtained employing a cathodic arc with a straight magnetic filter. The films were characterized using X-ray diffraction, scanning electron and atomic force microscopy. The films were found to be dense and with columnar grains, whose size increased with the exposure time....
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| Formato: | CONF |
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| Acceso en línea: | http://hdl.handle.net/20.500.12110/paper_17426588_v511_n1_p_Bermeo |
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todo:paper_17426588_v511_n1_p_Bermeo2023-10-03T16:30:54Z Characterization of titanium films deposited with a cathodic arc using a straight magnetic duct Bermeo, F. Torre, H.D. Kleiman, A. Minotti, F. Marquez, A. Atomic force microscopy Deposition Deposition rates Magnetism Titanium X ray diffraction Axial positions Columnar grain Film roughness Macro-particles Nanostructured Ti Radial position Scanning electrons Titanium film Ducts Nanostructured Ti films were obtained employing a cathodic arc with a straight magnetic filter. The films were characterized using X-ray diffraction, scanning electron and atomic force microscopy. The films were found to be dense and with columnar grains, whose size increased with the exposure time. The number of macroparticles, the film roughness and the deposition rate were also analyzed, and the latter compared with the results of a fluid plasma model. Number of macroparticles and film roughness in samples located ahead of the magnetic duct inlet were higher than those determined from samples placed inside the magnetic duct. The deposition rate depended on the axial and radial position inside the duct. The thickness along the radial position was more uniform for samples located at axial positions near the filter extremes, but the mean deposition rate was lower at these positions. Measured and modeled deposition rates agreed reasonably well. CONF info:eu-repo/semantics/openAccess http://creativecommons.org/licenses/by/2.5/ar http://hdl.handle.net/20.500.12110/paper_17426588_v511_n1_p_Bermeo |
| institution |
Universidad de Buenos Aires |
| institution_str |
I-28 |
| repository_str |
R-134 |
| collection |
Biblioteca Digital - Facultad de Ciencias Exactas y Naturales (UBA) |
| topic |
Atomic force microscopy Deposition Deposition rates Magnetism Titanium X ray diffraction Axial positions Columnar grain Film roughness Macro-particles Nanostructured Ti Radial position Scanning electrons Titanium film Ducts |
| spellingShingle |
Atomic force microscopy Deposition Deposition rates Magnetism Titanium X ray diffraction Axial positions Columnar grain Film roughness Macro-particles Nanostructured Ti Radial position Scanning electrons Titanium film Ducts Bermeo, F. Torre, H.D. Kleiman, A. Minotti, F. Marquez, A. Characterization of titanium films deposited with a cathodic arc using a straight magnetic duct |
| topic_facet |
Atomic force microscopy Deposition Deposition rates Magnetism Titanium X ray diffraction Axial positions Columnar grain Film roughness Macro-particles Nanostructured Ti Radial position Scanning electrons Titanium film Ducts |
| description |
Nanostructured Ti films were obtained employing a cathodic arc with a straight magnetic filter. The films were characterized using X-ray diffraction, scanning electron and atomic force microscopy. The films were found to be dense and with columnar grains, whose size increased with the exposure time. The number of macroparticles, the film roughness and the deposition rate were also analyzed, and the latter compared with the results of a fluid plasma model. Number of macroparticles and film roughness in samples located ahead of the magnetic duct inlet were higher than those determined from samples placed inside the magnetic duct. The deposition rate depended on the axial and radial position inside the duct. The thickness along the radial position was more uniform for samples located at axial positions near the filter extremes, but the mean deposition rate was lower at these positions. Measured and modeled deposition rates agreed reasonably well. |
| format |
CONF |
| author |
Bermeo, F. Torre, H.D. Kleiman, A. Minotti, F. Marquez, A. |
| author_facet |
Bermeo, F. Torre, H.D. Kleiman, A. Minotti, F. Marquez, A. |
| author_sort |
Bermeo, F. |
| title |
Characterization of titanium films deposited with a cathodic arc using a straight magnetic duct |
| title_short |
Characterization of titanium films deposited with a cathodic arc using a straight magnetic duct |
| title_full |
Characterization of titanium films deposited with a cathodic arc using a straight magnetic duct |
| title_fullStr |
Characterization of titanium films deposited with a cathodic arc using a straight magnetic duct |
| title_full_unstemmed |
Characterization of titanium films deposited with a cathodic arc using a straight magnetic duct |
| title_sort |
characterization of titanium films deposited with a cathodic arc using a straight magnetic duct |
| url |
http://hdl.handle.net/20.500.12110/paper_17426588_v511_n1_p_Bermeo |
| work_keys_str_mv |
AT bermeof characterizationoftitaniumfilmsdepositedwithacathodicarcusingastraightmagneticduct AT torrehd characterizationoftitaniumfilmsdepositedwithacathodicarcusingastraightmagneticduct AT kleimana characterizationoftitaniumfilmsdepositedwithacathodicarcusingastraightmagneticduct AT minottif characterizationoftitaniumfilmsdepositedwithacathodicarcusingastraightmagneticduct AT marqueza characterizationoftitaniumfilmsdepositedwithacathodicarcusingastraightmagneticduct |
| _version_ |
1807318978329051136 |