Wachulak, P., Capeluto, M., Marconi, M., Menoni, C., & Rocca, J. Arrays of sub-100 nm features fabricated with table top extreme ultraviolet interferometric laser lithography.
Cita Chicago Style (17a ed.)Wachulak, P.W, M.G Capeluto, M.C Marconi, C.S Menoni, y J.J Rocca. Arrays of Sub-100 Nm Features Fabricated with Table Top Extreme Ultraviolet Interferometric Laser Lithography.
Cita MLA (8a ed.)Wachulak, P.W, et al. Arrays of Sub-100 Nm Features Fabricated with Table Top Extreme Ultraviolet Interferometric Laser Lithography.
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