Design of a phase shifting interferometer in the EUV for high precision metrology

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We present the design of phase shift interferometer for the extreme ultraviolet (EUV) that will be used with the illumination provided by a table top Ne-like Ar laser emitting at 46.9 nm. We develop a model that computes the beam propagation trough the instrument, taking into account the influence o...

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Autores principales: Capeluto, M.G., Marconi, M.C., Iemmi, C.
Formato: CONF
Materias:
Argon lasers
Extreme ultraviolet lithography
Interferometers
Pulsed lasers
Ar-laser
EUV lasers
Extreme ultraviolets
High-precision
Ne-like
Phase-shift interferometer
Phase-shifting interferometers
Table-top
Phase shift
Acceso en línea:http://hdl.handle.net/20.500.12110/paper_17426588_v274_n1_p_Capeluto
Aporte de:
Biblioteca Digital - Facultad de Ciencias Exactas y Naturales (UBA) de Universidad de Buenos Aires
id todo:paper_17426588_v274_n1_p_Capeluto
record_format dspace
spelling todo:paper_17426588_v274_n1_p_Capeluto2023-10-03T16:30:36Z Design of a phase shifting interferometer in the EUV for high precision metrology Capeluto, M.G. Marconi, M.C. Iemmi, C. Argon lasers Extreme ultraviolet lithography Interferometers Pulsed lasers Ar-laser EUV lasers Extreme ultraviolets High-precision Ne-like Phase-shift interferometer Phase-shifting interferometers Table-top Phase shift We present the design of phase shift interferometer for the extreme ultraviolet (EUV) that will be used with the illumination provided by a table top Ne-like Ar laser emitting at 46.9 nm. We develop a model that computes the beam propagation trough the instrument, taking into account the influence of the fluctuations from shot-to-shot of the pulsed EUV laser on the retrieved wavefront. Fil:Capeluto, M.G. Universidad de Buenos Aires. Facultad de Ciencias Exactas y Naturales; Argentina. Fil:Marconi, M.C. Universidad de Buenos Aires. Facultad de Ciencias Exactas y Naturales; Argentina. Fil:Iemmi, C. Universidad de Buenos Aires. Facultad de Ciencias Exactas y Naturales; Argentina. CONF info:eu-repo/semantics/openAccess http://creativecommons.org/licenses/by/2.5/ar http://hdl.handle.net/20.500.12110/paper_17426588_v274_n1_p_Capeluto
institution Universidad de Buenos Aires
institution_str I-28
repository_str R-134
collection Biblioteca Digital - Facultad de Ciencias Exactas y Naturales (UBA)
topic Argon lasers
Extreme ultraviolet lithography
Interferometers
Pulsed lasers
Ar-laser
EUV lasers
Extreme ultraviolets
High-precision
Ne-like
Phase-shift interferometer
Phase-shifting interferometers
Table-top
Phase shift
spellingShingle Argon lasers
Extreme ultraviolet lithography
Interferometers
Pulsed lasers
Ar-laser
EUV lasers
Extreme ultraviolets
High-precision
Ne-like
Phase-shift interferometer
Phase-shifting interferometers
Table-top
Phase shift
Capeluto, M.G.
Marconi, M.C.
Iemmi, C.
Design of a phase shifting interferometer in the EUV for high precision metrology
topic_facet Argon lasers
Extreme ultraviolet lithography
Interferometers
Pulsed lasers
Ar-laser
EUV lasers
Extreme ultraviolets
High-precision
Ne-like
Phase-shift interferometer
Phase-shifting interferometers
Table-top
Phase shift
description We present the design of phase shift interferometer for the extreme ultraviolet (EUV) that will be used with the illumination provided by a table top Ne-like Ar laser emitting at 46.9 nm. We develop a model that computes the beam propagation trough the instrument, taking into account the influence of the fluctuations from shot-to-shot of the pulsed EUV laser on the retrieved wavefront.
format CONF
author Capeluto, M.G.
Marconi, M.C.
Iemmi, C.
author_facet Capeluto, M.G.
Marconi, M.C.
Iemmi, C.
author_sort Capeluto, M.G.
title Design of a phase shifting interferometer in the EUV for high precision metrology
title_short Design of a phase shifting interferometer in the EUV for high precision metrology
title_full Design of a phase shifting interferometer in the EUV for high precision metrology
title_fullStr Design of a phase shifting interferometer in the EUV for high precision metrology
title_full_unstemmed Design of a phase shifting interferometer in the EUV for high precision metrology
title_sort design of a phase shifting interferometer in the euv for high precision metrology
url http://hdl.handle.net/20.500.12110/paper_17426588_v274_n1_p_Capeluto
work_keys_str_mv AT capelutomg designofaphaseshiftinginterferometerintheeuvforhighprecisionmetrology
AT marconimc designofaphaseshiftinginterferometerintheeuvforhighprecisionmetrology
AT iemmic designofaphaseshiftinginterferometerintheeuvforhighprecisionmetrology
_version_ 1807322542089699328

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