Calibration of subnanometer motion with picometer accuracy

We have developed a method for calibrating subnanometer movements of a piezoelectric actuator with picometer accuracy and for a wide range of frequencies. This range make this calibration useful for scanning probe microscopes, particularly for an apertureless scanning near-field optical microscope i...

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Detalles Bibliográficos
Autores principales: Grecco, H.E., Martínez, O.E.
Formato: JOUR
Materias:
Actuators
Harmonic analysis
Interferometers
Interferometry
Microscopes
Near field scanning optical microscopy
Piezoelectric devices
Signal processing
Scanning probe microscopes
Optical devices
Acceso en línea:http://hdl.handle.net/20.500.12110/paper_1559128X_v41_n31_p6646_Grecco
Aporte de:
Biblioteca Digital - Facultad de Ciencias Exactas y Naturales (UBA) de Universidad de Buenos Aires

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