Calibration of subnanometer motion with picometer accuracy

We have developed a method for calibrating subnanometer movements of a piezoelectric actuator with picometer accuracy and for a wide range of frequencies. This range make this calibration useful for scanning probe microscopes, particularly for an apertureless scanning near-field optical microscope i...

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Autores principales: Grecco, H.E., Martínez, O.E.
Formato: JOUR
Materias:
Actuators
Harmonic analysis
Interferometers
Interferometry
Microscopes
Near field scanning optical microscopy
Piezoelectric devices
Signal processing
Scanning probe microscopes
Optical devices
Acceso en línea:http://hdl.handle.net/20.500.12110/paper_1559128X_v41_n31_p6646_Grecco
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Biblioteca Digital - Facultad de Ciencias Exactas y Naturales (UBA) de Universidad de Buenos Aires
id todo:paper_1559128X_v41_n31_p6646_Grecco
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spelling todo:paper_1559128X_v41_n31_p6646_Grecco2023-10-03T16:26:03Z Calibration of subnanometer motion with picometer accuracy Grecco, H.E. Martínez, O.E. Actuators Harmonic analysis Interferometers Interferometry Microscopes Near field scanning optical microscopy Piezoelectric devices Signal processing Scanning probe microscopes Optical devices We have developed a method for calibrating subnanometer movements of a piezoelectric actuator with picometer accuracy and for a wide range of frequencies. This range make this calibration useful for scanning probe microscopes, particularly for an apertureless scanning near-field optical microscope in which the tip is dithered to modulate the optical signal. The setup consists of a Michelson interferometer that has a mobile arm capable of moving more than one fringe. The piezoelectric actuator to be calibrated vibrates at the desired frequency in the other arm. Net displacement can be calculated by simultaneous measurement of an interferometric signal and its derivative. Hysteresis of the system can be also measured. It will be shown that the actuator response is linear only for the low-frequency region (in our case as much as approximately 10 kHz). Above that frequency range, higher harmonics appear and cannot be neglected to obtain real displacement. Finally, it will be shown that the use of higher harmonics in calibration or detection schemes (that rely on the linearity of the response) must be validated, and this technique has proved adequate for that purpose. © 2002 Optical Society of America. Fil:Grecco, H.E. Universidad de Buenos Aires. Facultad de Ciencias Exactas y Naturales; Argentina. Fil:Martínez, O.E. Universidad de Buenos Aires. Facultad de Ciencias Exactas y Naturales; Argentina. JOUR info:eu-repo/semantics/openAccess http://creativecommons.org/licenses/by/2.5/ar http://hdl.handle.net/20.500.12110/paper_1559128X_v41_n31_p6646_Grecco
institution Universidad de Buenos Aires
institution_str I-28
repository_str R-134
collection Biblioteca Digital - Facultad de Ciencias Exactas y Naturales (UBA)
topic Actuators
Harmonic analysis
Interferometers
Interferometry
Microscopes
Near field scanning optical microscopy
Piezoelectric devices
Signal processing
Scanning probe microscopes
Optical devices
spellingShingle Actuators
Harmonic analysis
Interferometers
Interferometry
Microscopes
Near field scanning optical microscopy
Piezoelectric devices
Signal processing
Scanning probe microscopes
Optical devices
Grecco, H.E.
Martínez, O.E.
Calibration of subnanometer motion with picometer accuracy
topic_facet Actuators
Harmonic analysis
Interferometers
Interferometry
Microscopes
Near field scanning optical microscopy
Piezoelectric devices
Signal processing
Scanning probe microscopes
Optical devices
description We have developed a method for calibrating subnanometer movements of a piezoelectric actuator with picometer accuracy and for a wide range of frequencies. This range make this calibration useful for scanning probe microscopes, particularly for an apertureless scanning near-field optical microscope in which the tip is dithered to modulate the optical signal. The setup consists of a Michelson interferometer that has a mobile arm capable of moving more than one fringe. The piezoelectric actuator to be calibrated vibrates at the desired frequency in the other arm. Net displacement can be calculated by simultaneous measurement of an interferometric signal and its derivative. Hysteresis of the system can be also measured. It will be shown that the actuator response is linear only for the low-frequency region (in our case as much as approximately 10 kHz). Above that frequency range, higher harmonics appear and cannot be neglected to obtain real displacement. Finally, it will be shown that the use of higher harmonics in calibration or detection schemes (that rely on the linearity of the response) must be validated, and this technique has proved adequate for that purpose. © 2002 Optical Society of America.
format JOUR
author Grecco, H.E.
Martínez, O.E.
author_facet Grecco, H.E.
Martínez, O.E.
author_sort Grecco, H.E.
title Calibration of subnanometer motion with picometer accuracy
title_short Calibration of subnanometer motion with picometer accuracy
title_full Calibration of subnanometer motion with picometer accuracy
title_fullStr Calibration of subnanometer motion with picometer accuracy
title_full_unstemmed Calibration of subnanometer motion with picometer accuracy
title_sort calibration of subnanometer motion with picometer accuracy
url http://hdl.handle.net/20.500.12110/paper_1559128X_v41_n31_p6646_Grecco
work_keys_str_mv AT greccohe calibrationofsubnanometermotionwithpicometeraccuracy
AT martinezoe calibrationofsubnanometermotionwithpicometeraccuracy
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