Performance of a magnetic island macroparticle filter in a titanium vacuum arc

A magnetic island filter for removing macroparticles during Ti vacuum arc deposition is characterized and optimized. The filter comprised three external coils, which generated a uniform magnetic field, and an internal coaxial coil with a cylindrical permanent magnet in its core, placed within the ma...

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Detalles Bibliográficos
Autores principales:	Kleiman, A., Márquez, A., Boxman, R.L.
Formato:	JOUR
Materias:	Electric coils Electric currents Elementary particles Magnetic fields Permanent magnets Scanning electron microscopy Coaxial coils Ion transmission Macroparticle filters Magnetic devices
Acceso en línea:	http://hdl.handle.net/20.500.12110/paper_09630252_v17_n1_p_Kleiman
Aporte de:	Biblioteca Digital - Facultad de Ciencias Exactas y Naturales (UBA) de Universidad de Buenos Aires

id	todo:paper_09630252_v17_n1_p_Kleiman
record_format	dspace
spelling	todo:paper_09630252_v17_n1_p_Kleiman2023-10-03T15:54:22Z Performance of a magnetic island macroparticle filter in a titanium vacuum arc Kleiman, A. Márquez, A. Boxman, R.L. Electric coils Electric currents Elementary particles Magnetic fields Permanent magnets Scanning electron microscopy Coaxial coils Ion transmission Macroparticle filters Magnetic devices A magnetic island filter for removing macroparticles during Ti vacuum arc deposition is characterized and optimized. The filter comprised three external coils, which generated a uniform magnetic field, and an internal coaxial coil with a cylindrical permanent magnet in its core, placed within the magnetic island, that generated a field in the opposite direction to the external field. The performance of the filter was studied for different field configurations in which the external and the internal fields were varied in the range 0-5 mT. The plasma transport efficiency was analysed by measuring the ion saturation current at different radial positions with probes. The ion transmission efficiency on the system axis was ∼25%. Observation of the coating surface morphology with optical and scanning electronic microscopy determined that the macroparticles were effectively removed in a 12 cm diameter deposition region. For the best field configuration, the integrated ion current collected in that region was about 1.4% of the total arc current. © 2008 IOP Publishing Ltd. Fil:Kleiman, A. Universidad de Buenos Aires. Facultad de Ciencias Exactas y Naturales; Argentina. Fil:Márquez, A. Universidad de Buenos Aires. Facultad de Ciencias Exactas y Naturales; Argentina. JOUR info:eu-repo/semantics/openAccess http://creativecommons.org/licenses/by/2.5/ar http://hdl.handle.net/20.500.12110/paper_09630252_v17_n1_p_Kleiman
institution	Universidad de Buenos Aires
institution_str	I-28
repository_str	R-134
collection	Biblioteca Digital - Facultad de Ciencias Exactas y Naturales (UBA)
topic	Electric coils Electric currents Elementary particles Magnetic fields Permanent magnets Scanning electron microscopy Coaxial coils Ion transmission Macroparticle filters Magnetic devices
spellingShingle	Electric coils Electric currents Elementary particles Magnetic fields Permanent magnets Scanning electron microscopy Coaxial coils Ion transmission Macroparticle filters Magnetic devices Kleiman, A. Márquez, A. Boxman, R.L. Performance of a magnetic island macroparticle filter in a titanium vacuum arc
topic_facet	Electric coils Electric currents Elementary particles Magnetic fields Permanent magnets Scanning electron microscopy Coaxial coils Ion transmission Macroparticle filters Magnetic devices
description	A magnetic island filter for removing macroparticles during Ti vacuum arc deposition is characterized and optimized. The filter comprised three external coils, which generated a uniform magnetic field, and an internal coaxial coil with a cylindrical permanent magnet in its core, placed within the magnetic island, that generated a field in the opposite direction to the external field. The performance of the filter was studied for different field configurations in which the external and the internal fields were varied in the range 0-5 mT. The plasma transport efficiency was analysed by measuring the ion saturation current at different radial positions with probes. The ion transmission efficiency on the system axis was ∼25%. Observation of the coating surface morphology with optical and scanning electronic microscopy determined that the macroparticles were effectively removed in a 12 cm diameter deposition region. For the best field configuration, the integrated ion current collected in that region was about 1.4% of the total arc current. © 2008 IOP Publishing Ltd.
format	JOUR
author	Kleiman, A. Márquez, A. Boxman, R.L.
author_facet	Kleiman, A. Márquez, A. Boxman, R.L.
author_sort	Kleiman, A.
title	Performance of a magnetic island macroparticle filter in a titanium vacuum arc
title_short	Performance of a magnetic island macroparticle filter in a titanium vacuum arc
title_full	Performance of a magnetic island macroparticle filter in a titanium vacuum arc
title_fullStr	Performance of a magnetic island macroparticle filter in a titanium vacuum arc
title_full_unstemmed	Performance of a magnetic island macroparticle filter in a titanium vacuum arc
title_sort	performance of a magnetic island macroparticle filter in a titanium vacuum arc
url	http://hdl.handle.net/20.500.12110/paper_09630252_v17_n1_p_Kleiman
work_keys_str_mv	AT kleimana performanceofamagneticislandmacroparticlefilterinatitaniumvacuumarc AT marqueza performanceofamagneticislandmacroparticlefilterinatitaniumvacuumarc AT boxmanrl performanceofamagneticislandmacroparticlefilterinatitaniumvacuumarc
_version_	1782030941808492544

Performance of a magnetic island macroparticle filter in a titanium vacuum arc

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