Ion emission in a dc titanium cathodic arc operated with oxygen
The ion emission and its correlation with the deposition rate in a dc titanium cathodic arc run in an oxygen ambient with a current of 115 A has been investigated. The incoming O 2 flow was varied between 10-60 sccm, resulting in a working pressure of 0.1-10 Pa. The ion saturation current measuremen...
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| Acceso en línea: | http://hdl.handle.net/20.500.12110/paper_02811847_vT131_n_p_Kleiman |
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todo:paper_02811847_vT131_n_p_Kleiman2023-10-03T15:17:11Z Ion emission in a dc titanium cathodic arc operated with oxygen Kleiman, A. Márquez, A. Kelly, H. Cathodic arc Glass substrates Ion density Ion emissions Ion energies Ion saturation current Operation parameters Oxygen ambient Sticking coefficients Working pressures Cavity resonators Deposition rates Electric current measurement Leakage (fluid) Oxygen Probes Titanium Ions The ion emission and its correlation with the deposition rate in a dc titanium cathodic arc run in an oxygen ambient with a current of 115 A has been investigated. The incoming O 2 flow was varied between 10-60 sccm, resulting in a working pressure of 0.1-10 Pa. The ion saturation current measurements were carried out with Langmuir probes located on the system axis at two distances, 20 and 30 cm, from the cathode. The deposition rates were determined by weighting the deposited mass on glass substrates located at the same positions as the probes. The ion density and ion energy were estimated for the different operation parameters. The sticking coefficient for titanium was estimated by using the deposition rate and the ion saturation current. © 2008 The Royal Swedish Academy of Sciences. CONF info:eu-repo/semantics/openAccess http://creativecommons.org/licenses/by/2.5/ar http://hdl.handle.net/20.500.12110/paper_02811847_vT131_n_p_Kleiman |
| institution |
Universidad de Buenos Aires |
| institution_str |
I-28 |
| repository_str |
R-134 |
| collection |
Biblioteca Digital - Facultad de Ciencias Exactas y Naturales (UBA) |
| topic |
Cathodic arc Glass substrates Ion density Ion emissions Ion energies Ion saturation current Operation parameters Oxygen ambient Sticking coefficients Working pressures Cavity resonators Deposition rates Electric current measurement Leakage (fluid) Oxygen Probes Titanium Ions |
| spellingShingle |
Cathodic arc Glass substrates Ion density Ion emissions Ion energies Ion saturation current Operation parameters Oxygen ambient Sticking coefficients Working pressures Cavity resonators Deposition rates Electric current measurement Leakage (fluid) Oxygen Probes Titanium Ions Kleiman, A. Márquez, A. Kelly, H. Ion emission in a dc titanium cathodic arc operated with oxygen |
| topic_facet |
Cathodic arc Glass substrates Ion density Ion emissions Ion energies Ion saturation current Operation parameters Oxygen ambient Sticking coefficients Working pressures Cavity resonators Deposition rates Electric current measurement Leakage (fluid) Oxygen Probes Titanium Ions |
| description |
The ion emission and its correlation with the deposition rate in a dc titanium cathodic arc run in an oxygen ambient with a current of 115 A has been investigated. The incoming O 2 flow was varied between 10-60 sccm, resulting in a working pressure of 0.1-10 Pa. The ion saturation current measurements were carried out with Langmuir probes located on the system axis at two distances, 20 and 30 cm, from the cathode. The deposition rates were determined by weighting the deposited mass on glass substrates located at the same positions as the probes. The ion density and ion energy were estimated for the different operation parameters. The sticking coefficient for titanium was estimated by using the deposition rate and the ion saturation current. © 2008 The Royal Swedish Academy of Sciences. |
| format |
CONF |
| author |
Kleiman, A. Márquez, A. Kelly, H. |
| author_facet |
Kleiman, A. Márquez, A. Kelly, H. |
| author_sort |
Kleiman, A. |
| title |
Ion emission in a dc titanium cathodic arc operated with oxygen |
| title_short |
Ion emission in a dc titanium cathodic arc operated with oxygen |
| title_full |
Ion emission in a dc titanium cathodic arc operated with oxygen |
| title_fullStr |
Ion emission in a dc titanium cathodic arc operated with oxygen |
| title_full_unstemmed |
Ion emission in a dc titanium cathodic arc operated with oxygen |
| title_sort |
ion emission in a dc titanium cathodic arc operated with oxygen |
| url |
http://hdl.handle.net/20.500.12110/paper_02811847_vT131_n_p_Kleiman |
| work_keys_str_mv |
AT kleimana ionemissioninadctitaniumcathodicarcoperatedwithoxygen AT marqueza ionemissioninadctitaniumcathodicarcoperatedwithoxygen AT kellyh ionemissioninadctitaniumcathodicarcoperatedwithoxygen |
| _version_ |
1782027623395753984 |