Three-dimensional ion distribution in a filtered vacuum arc discharge

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Three-dimensional measurements of the ion flux along the filter of a magnetically filtered d-c vacuum arc are presented. The device includes a metallic plasma-generating chamber with cooper electrodes coupled to a substrate chamber through a quarter-torus magnetic filter. The filtering magnetic fiel...

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Detalles Bibliográficos
Autores principales: Kelly, H., Marquez, A., Pirrera, M.
Formato: JOUR
Acceso en línea:http://hdl.handle.net/20.500.12110/paper_0094243X_v875_n_p254_Kelly
Aporte de:
Biblioteca Digital - Facultad de Ciencias Exactas y Naturales (UBA) de Universidad de Buenos Aires

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