Three-dimensional ion distribution in a filtered vacuum arc discharge

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Three-dimensional measurements of the ion flux along the filter of a magnetically filtered d-c vacuum arc are presented. The device includes a metallic plasma-generating chamber with cooper electrodes coupled to a substrate chamber through a quarter-torus magnetic filter. The filtering magnetic fiel...

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Autores principales: Kelly, H., Marquez, A., Pirrera, M.
Formato: JOUR
Acceso en línea:http://hdl.handle.net/20.500.12110/paper_0094243X_v875_n_p254_Kelly
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Biblioteca Digital - Facultad de Ciencias Exactas y Naturales (UBA) de Universidad de Buenos Aires
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spelling todo:paper_0094243X_v875_n_p254_Kelly2023-10-03T14:56:12Z Three-dimensional ion distribution in a filtered vacuum arc discharge Kelly, H. Marquez, A. Pirrera, M. Three-dimensional measurements of the ion flux along the filter of a magnetically filtered d-c vacuum arc are presented. The device includes a metallic plasma-generating chamber with cooper electrodes coupled to a substrate chamber through a quarter-torus magnetic filter. The filtering magnetic field was high enough to magnetize the electrons but not the ions. The ion current distribution was studied using a multi-element Cu probes, placed at three different positions along the filter. The ion saturation current of each probe was measured by biasing the probe at -70V with respect the grounded anode. Preliminary results of the three dimensional ion flux distribution and the floating potential of the plasma as functions of the bias filter voltage and magnetic field intensity are reported. © 2006 American Institute of Physics. Fil:Kelly, H. Universidad de Buenos Aires. Facultad de Ciencias Exactas y Naturales; Argentina. Fil:Marquez, A. Universidad de Buenos Aires. Facultad de Ciencias Exactas y Naturales; Argentina. Fil:Pirrera, M. Universidad de Buenos Aires. Facultad de Ciencias Exactas y Naturales; Argentina. JOUR info:eu-repo/semantics/openAccess http://creativecommons.org/licenses/by/2.5/ar http://hdl.handle.net/20.500.12110/paper_0094243X_v875_n_p254_Kelly
institution Universidad de Buenos Aires
institution_str I-28
repository_str R-134
collection Biblioteca Digital - Facultad de Ciencias Exactas y Naturales (UBA)
description Three-dimensional measurements of the ion flux along the filter of a magnetically filtered d-c vacuum arc are presented. The device includes a metallic plasma-generating chamber with cooper electrodes coupled to a substrate chamber through a quarter-torus magnetic filter. The filtering magnetic field was high enough to magnetize the electrons but not the ions. The ion current distribution was studied using a multi-element Cu probes, placed at three different positions along the filter. The ion saturation current of each probe was measured by biasing the probe at -70V with respect the grounded anode. Preliminary results of the three dimensional ion flux distribution and the floating potential of the plasma as functions of the bias filter voltage and magnetic field intensity are reported. © 2006 American Institute of Physics.
format JOUR
author Kelly, H.
Marquez, A.
Pirrera, M.
spellingShingle Kelly, H.
Marquez, A.
Pirrera, M.
Three-dimensional ion distribution in a filtered vacuum arc discharge
author_facet Kelly, H.
Marquez, A.
Pirrera, M.
author_sort Kelly, H.
title Three-dimensional ion distribution in a filtered vacuum arc discharge
title_short Three-dimensional ion distribution in a filtered vacuum arc discharge
title_full Three-dimensional ion distribution in a filtered vacuum arc discharge
title_fullStr Three-dimensional ion distribution in a filtered vacuum arc discharge
title_full_unstemmed Three-dimensional ion distribution in a filtered vacuum arc discharge
title_sort three-dimensional ion distribution in a filtered vacuum arc discharge
url http://hdl.handle.net/20.500.12110/paper_0094243X_v875_n_p254_Kelly
work_keys_str_mv AT kellyh threedimensionaliondistributioninafilteredvacuumarcdischarge
AT marqueza threedimensionaliondistributioninafilteredvacuumarcdischarge
AT pirreram threedimensionaliondistributioninafilteredvacuumarcdischarge
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