Study of the efficiency of magnetic island macroparticle filters for different vacuum arc configurations

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In the present work, we studied the efficiency of a magnetic island filter for two vacuum arc designs, pulsed and continuous. The magnetic island filter consisted in a straight duct with an external solenoid and a magnet enclosed in a housing (magnetic island) located inside the duct on its axis, an...

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Autores principales: Duran, A.A., Fazio, M., Kleiman, A., Giuliani, L., Marquez, A., Grondona, D.
Formato: Documento de conferencia publishedVersion
Lenguaje:Inglés
Publicado: 2012
Materias:
Bandpass filters
Ducts
Efficiency
Housing
Magnetic fields
Magnetism
Vacuum applications
Vacuum technology
Coating surface morphologies
Ion saturation current
Ion transmission efficiency
Macro-particles
Macroparticle filter
Magnetic field line
Magnetic island
Plasma transport
Magnetoplasma
Acceso en línea:http://hdl.handle.net/20.500.12110/paper_17426588_v370_n1_p_Duran
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Biblioteca Digital - Facultad de Ciencias Exactas y Naturales (UBA) de Universidad de Buenos Aires
id paperaa:paper_17426588_v370_n1_p_Duran
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spelling paperaa:paper_17426588_v370_n1_p_Duran2023-06-12T16:51:04Z Study of the efficiency of magnetic island macroparticle filters for different vacuum arc configurations J. Phys. Conf. Ser. 2012;370(1) Duran, A.A. Fazio, M. Kleiman, A. Giuliani, L. Marquez, A. Grondona, D. Bandpass filters Ducts Efficiency Housing Magnetic fields Magnetism Vacuum applications Vacuum technology Coating surface morphologies Ion saturation current Ion transmission efficiency Macro-particles Macroparticle filter Magnetic field line Magnetic island Plasma transport Magnetoplasma In the present work, we studied the efficiency of a magnetic island filter for two vacuum arc designs, pulsed and continuous. The magnetic island filter consisted in a straight duct with an external solenoid and a magnet enclosed in a housing (magnetic island) located inside the duct on its axis, and both magnetic fields are in opposite direction. The housing of the magnetic island obstructs the line of sight between the cathode and the substrate. In this arrangement, the charged plasma components move along the curved magnetic field lines, around the magnetic island, but the macroparticles move in straight paths and deposit on the wall of the magnetic island housing. The performance of the filter was characterized for different external and internal field strengths. The plasma transport efficiency was analyzed by measuring the ion saturation current with Langmuir probes and the deposited mass rate. The ion transmission efficiency around the system axis achieved values around 25%. Observation of the coating surface morphology with optical microscopy determined that the macroparticles were effectively removed. Fil:Fazio, M. Universidad de Buenos Aires. Facultad de Ciencias Exactas y Naturales; Argentina. Fil:Kleiman, A. Universidad de Buenos Aires. Facultad de Ciencias Exactas y Naturales; Argentina. Fil:Giuliani, L. Universidad de Buenos Aires. Facultad de Ciencias Exactas y Naturales; Argentina. Fil:Marquez, A. Universidad de Buenos Aires. Facultad de Ciencias Exactas y Naturales; Argentina. Fil:Grondona, D. Universidad de Buenos Aires. Facultad de Ciencias Exactas y Naturales; Argentina. 2012 info:eu-repo/semantics/conferenceObject info:ar-repo/semantics/documento de conferencia info:eu-repo/semantics/publishedVersion application/pdf eng info:eu-repo/semantics/openAccess http://creativecommons.org/licenses/by/2.5/ar http://hdl.handle.net/20.500.12110/paper_17426588_v370_n1_p_Duran
institution Universidad de Buenos Aires
institution_str I-28
repository_str R-134
collection Biblioteca Digital - Facultad de Ciencias Exactas y Naturales (UBA)
language Inglés
orig_language_str_mv eng
topic Bandpass filters
Ducts
Efficiency
Housing
Magnetic fields
Magnetism
Vacuum applications
Vacuum technology
Coating surface morphologies
Ion saturation current
Ion transmission efficiency
Macro-particles
Macroparticle filter
Magnetic field line
Magnetic island
Plasma transport
Magnetoplasma
spellingShingle Bandpass filters
Ducts
Efficiency
Housing
Magnetic fields
Magnetism
Vacuum applications
Vacuum technology
Coating surface morphologies
Ion saturation current
Ion transmission efficiency
Macro-particles
Macroparticle filter
Magnetic field line
Magnetic island
Plasma transport
Magnetoplasma
Duran, A.A.
Fazio, M.
Kleiman, A.
Giuliani, L.
Marquez, A.
Grondona, D.
Study of the efficiency of magnetic island macroparticle filters for different vacuum arc configurations
topic_facet Bandpass filters
Ducts
Efficiency
Housing
Magnetic fields
Magnetism
Vacuum applications
Vacuum technology
Coating surface morphologies
Ion saturation current
Ion transmission efficiency
Macro-particles
Macroparticle filter
Magnetic field line
Magnetic island
Plasma transport
Magnetoplasma
description In the present work, we studied the efficiency of a magnetic island filter for two vacuum arc designs, pulsed and continuous. The magnetic island filter consisted in a straight duct with an external solenoid and a magnet enclosed in a housing (magnetic island) located inside the duct on its axis, and both magnetic fields are in opposite direction. The housing of the magnetic island obstructs the line of sight between the cathode and the substrate. In this arrangement, the charged plasma components move along the curved magnetic field lines, around the magnetic island, but the macroparticles move in straight paths and deposit on the wall of the magnetic island housing. The performance of the filter was characterized for different external and internal field strengths. The plasma transport efficiency was analyzed by measuring the ion saturation current with Langmuir probes and the deposited mass rate. The ion transmission efficiency around the system axis achieved values around 25%. Observation of the coating surface morphology with optical microscopy determined that the macroparticles were effectively removed.
format Documento de conferencia
Documento de conferencia
publishedVersion
author Duran, A.A.
Fazio, M.
Kleiman, A.
Giuliani, L.
Marquez, A.
Grondona, D.
author_facet Duran, A.A.
Fazio, M.
Kleiman, A.
Giuliani, L.
Marquez, A.
Grondona, D.
author_sort Duran, A.A.
title Study of the efficiency of magnetic island macroparticle filters for different vacuum arc configurations
title_short Study of the efficiency of magnetic island macroparticle filters for different vacuum arc configurations
title_full Study of the efficiency of magnetic island macroparticle filters for different vacuum arc configurations
title_fullStr Study of the efficiency of magnetic island macroparticle filters for different vacuum arc configurations
title_full_unstemmed Study of the efficiency of magnetic island macroparticle filters for different vacuum arc configurations
title_sort study of the efficiency of magnetic island macroparticle filters for different vacuum arc configurations
publishDate 2012
url http://hdl.handle.net/20.500.12110/paper_17426588_v370_n1_p_Duran
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AT giulianil studyoftheefficiencyofmagneticislandmacroparticlefiltersfordifferentvacuumarcconfigurations
AT marqueza studyoftheefficiencyofmagneticislandmacroparticlefiltersfordifferentvacuumarcconfigurations
AT grondonad studyoftheefficiencyofmagneticislandmacroparticlefiltersfordifferentvacuumarcconfigurations
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