Characterization of a quarter torus filter for vacuum arc ion flux transmission

Measurements on the ion flux transmission in a magnetically filtered d-c vacuum arc are presented. The device includes a metallic plasma-generating chamber with water-cooled electrodes coupled to a substrate chamber through a quarter-torus magnetic filter. It is employed a Copper cathode (6 cm in di...

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Detalles Bibliográficos
Autores principales: Kelly, H., Márquez, A., Pirrera, M.
Formato: Artículo publishedVersion
Lenguaje:Inglés
Publicado: 2004
Acceso en línea:http://hdl.handle.net/20.500.12110/paper_01039733_v34_n4B_p1513_Kelly
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