Design of a phase shifting interferometer in the EUV for high precision metrology

We present the design of phase shift interferometer for the extreme ultraviolet (EUV) that will be used with the illumination provided by a table top Ne-like Ar laser emitting at 46.9 nm. We develop a model that computes the beam propagation trough the instrument, taking into account the influence o...

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Detalles Bibliográficos
Autores principales:	Capeluto, María Gabriela, Marconi, Mario Carlos, Iemmi, Claudio César
Publicado:	2011
Materias:	Argon lasers Extreme ultraviolet lithography Interferometers Pulsed lasers Ar-laser EUV lasers Extreme ultraviolets High-precision Ne-like Phase-shift interferometer Phase-shifting interferometers Table-top Phase shift
Acceso en línea:	https://bibliotecadigital.exactas.uba.ar/collection/paper/document/paper_17426588_v274_n1_p_Capeluto http://hdl.handle.net/20.500.12110/paper_17426588_v274_n1_p_Capeluto
Aporte de:	Biblioteca Digital - Facultad de Ciencias Exactas y Naturales (UBA) de Universidad de Buenos Aires

id	paper:paper_17426588_v274_n1_p_Capeluto
record_format	dspace
spelling	paper:paper_17426588_v274_n1_p_Capeluto2023-06-08T16:27:16Z Design of a phase shifting interferometer in the EUV for high precision metrology Capeluto, María Gabriela Marconi, Mario Carlos Iemmi, Claudio César Argon lasers Extreme ultraviolet lithography Interferometers Pulsed lasers Ar-laser EUV lasers Extreme ultraviolets High-precision Ne-like Phase-shift interferometer Phase-shifting interferometers Table-top Phase shift We present the design of phase shift interferometer for the extreme ultraviolet (EUV) that will be used with the illumination provided by a table top Ne-like Ar laser emitting at 46.9 nm. We develop a model that computes the beam propagation trough the instrument, taking into account the influence of the fluctuations from shot-to-shot of the pulsed EUV laser on the retrieved wavefront. Fil:Capeluto, M.G. Universidad de Buenos Aires. Facultad de Ciencias Exactas y Naturales; Argentina. Fil:Marconi, M.C. Universidad de Buenos Aires. Facultad de Ciencias Exactas y Naturales; Argentina. Fil:Iemmi, C. Universidad de Buenos Aires. Facultad de Ciencias Exactas y Naturales; Argentina. 2011 https://bibliotecadigital.exactas.uba.ar/collection/paper/document/paper_17426588_v274_n1_p_Capeluto http://hdl.handle.net/20.500.12110/paper_17426588_v274_n1_p_Capeluto
institution	Universidad de Buenos Aires
institution_str	I-28
repository_str	R-134
collection	Biblioteca Digital - Facultad de Ciencias Exactas y Naturales (UBA)
topic	Argon lasers Extreme ultraviolet lithography Interferometers Pulsed lasers Ar-laser EUV lasers Extreme ultraviolets High-precision Ne-like Phase-shift interferometer Phase-shifting interferometers Table-top Phase shift
spellingShingle	Argon lasers Extreme ultraviolet lithography Interferometers Pulsed lasers Ar-laser EUV lasers Extreme ultraviolets High-precision Ne-like Phase-shift interferometer Phase-shifting interferometers Table-top Phase shift Capeluto, María Gabriela Marconi, Mario Carlos Iemmi, Claudio César Design of a phase shifting interferometer in the EUV for high precision metrology
topic_facet	Argon lasers Extreme ultraviolet lithography Interferometers Pulsed lasers Ar-laser EUV lasers Extreme ultraviolets High-precision Ne-like Phase-shift interferometer Phase-shifting interferometers Table-top Phase shift
description	We present the design of phase shift interferometer for the extreme ultraviolet (EUV) that will be used with the illumination provided by a table top Ne-like Ar laser emitting at 46.9 nm. We develop a model that computes the beam propagation trough the instrument, taking into account the influence of the fluctuations from shot-to-shot of the pulsed EUV laser on the retrieved wavefront.
author	Capeluto, María Gabriela Marconi, Mario Carlos Iemmi, Claudio César
author_facet	Capeluto, María Gabriela Marconi, Mario Carlos Iemmi, Claudio César
author_sort	Capeluto, María Gabriela
title	Design of a phase shifting interferometer in the EUV for high precision metrology
title_short	Design of a phase shifting interferometer in the EUV for high precision metrology
title_full	Design of a phase shifting interferometer in the EUV for high precision metrology
title_fullStr	Design of a phase shifting interferometer in the EUV for high precision metrology
title_full_unstemmed	Design of a phase shifting interferometer in the EUV for high precision metrology
title_sort	design of a phase shifting interferometer in the euv for high precision metrology
publishDate	2011
url	https://bibliotecadigital.exactas.uba.ar/collection/paper/document/paper_17426588_v274_n1_p_Capeluto http://hdl.handle.net/20.500.12110/paper_17426588_v274_n1_p_Capeluto
work_keys_str_mv	AT capelutomariagabriela designofaphaseshiftinginterferometerintheeuvforhighprecisionmetrology AT marconimariocarlos designofaphaseshiftinginterferometerintheeuvforhighprecisionmetrology AT iemmiclaudiocesar designofaphaseshiftinginterferometerintheeuvforhighprecisionmetrology
_version_	1768544975868395520

Design of a phase shifting interferometer in the EUV for high precision metrology

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