Polarization conversion from highly conducting, asymmetric trapezoidal gratings

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The differences in the curves of the zeroth-order cross-polarization reflection coefficients (p→s and s→p) versus angle of incidence have remarkable potential for application in scatterometry because, if the differences are larger than the measurement error, they could contribute to a reliable nonde...

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Detalles Bibliográficos
Autores principales:	Depine, Ricardo Angel, Inchaussandague, Marina Elizabeth
Publicado:	2003
Materias:	Conductive materials Light polarization Light reflection Nondestructive examination Polarization conversion Diffraction gratings
Acceso en línea:	https://bibliotecadigital.exactas.uba.ar/collection/paper/document/paper_1559128X_v42_n19_p3742_Depine http://hdl.handle.net/20.500.12110/paper_1559128X_v42_n19_p3742_Depine
Aporte de:	Biblioteca Digital - Facultad de Ciencias Exactas y Naturales (UBA) de Universidad de Buenos Aires

id	paper:paper_1559128X_v42_n19_p3742_Depine
record_format	dspace
spelling	paper:paper_1559128X_v42_n19_p3742_Depine2023-06-08T16:23:37Z Polarization conversion from highly conducting, asymmetric trapezoidal gratings Depine, Ricardo Angel Inchaussandague, Marina Elizabeth Conductive materials Light polarization Light reflection Nondestructive examination Polarization conversion Diffraction gratings The differences in the curves of the zeroth-order cross-polarization reflection coefficients (p→s and s→p) versus angle of incidence have remarkable potential for application in scatterometry because, if the differences are larger than the measurement error, they could contribute to a reliable nondestructive technique for detecting asymmetries in grating profiles. The cross-polarization efficiencies of highly conducting metallic gratings with asymmetric trapezoidal profiles are investigated theoretically by means of a rigorous electromagnetic code. The results show that the differences between p→s and s→p conversion tend to be undetectable for highly conducting materials, a fact that limits, in principle, the application of this potential detection technique. © 2003 Optical Society of America. Fil:Depine, R.A. Universidad de Buenos Aires. Facultad de Ciencias Exactas y Naturales; Argentina. Fil:Inchaussandague, M.E. Universidad de Buenos Aires. Facultad de Ciencias Exactas y Naturales; Argentina. 2003 https://bibliotecadigital.exactas.uba.ar/collection/paper/document/paper_1559128X_v42_n19_p3742_Depine http://hdl.handle.net/20.500.12110/paper_1559128X_v42_n19_p3742_Depine
institution	Universidad de Buenos Aires
institution_str	I-28
repository_str	R-134
collection	Biblioteca Digital - Facultad de Ciencias Exactas y Naturales (UBA)
topic	Conductive materials Light polarization Light reflection Nondestructive examination Polarization conversion Diffraction gratings
spellingShingle	Conductive materials Light polarization Light reflection Nondestructive examination Polarization conversion Diffraction gratings Depine, Ricardo Angel Inchaussandague, Marina Elizabeth Polarization conversion from highly conducting, asymmetric trapezoidal gratings
topic_facet	Conductive materials Light polarization Light reflection Nondestructive examination Polarization conversion Diffraction gratings
description	The differences in the curves of the zeroth-order cross-polarization reflection coefficients (p→s and s→p) versus angle of incidence have remarkable potential for application in scatterometry because, if the differences are larger than the measurement error, they could contribute to a reliable nondestructive technique for detecting asymmetries in grating profiles. The cross-polarization efficiencies of highly conducting metallic gratings with asymmetric trapezoidal profiles are investigated theoretically by means of a rigorous electromagnetic code. The results show that the differences between p→s and s→p conversion tend to be undetectable for highly conducting materials, a fact that limits, in principle, the application of this potential detection technique. © 2003 Optical Society of America.
author	Depine, Ricardo Angel Inchaussandague, Marina Elizabeth
author_facet	Depine, Ricardo Angel Inchaussandague, Marina Elizabeth
author_sort	Depine, Ricardo Angel
title	Polarization conversion from highly conducting, asymmetric trapezoidal gratings
title_short	Polarization conversion from highly conducting, asymmetric trapezoidal gratings
title_full	Polarization conversion from highly conducting, asymmetric trapezoidal gratings
title_fullStr	Polarization conversion from highly conducting, asymmetric trapezoidal gratings
title_full_unstemmed	Polarization conversion from highly conducting, asymmetric trapezoidal gratings
title_sort	polarization conversion from highly conducting, asymmetric trapezoidal gratings
publishDate	2003
url	https://bibliotecadigital.exactas.uba.ar/collection/paper/document/paper_1559128X_v42_n19_p3742_Depine http://hdl.handle.net/20.500.12110/paper_1559128X_v42_n19_p3742_Depine
work_keys_str_mv	AT depinericardoangel polarizationconversionfromhighlyconductingasymmetrictrapezoidalgratings AT inchaussandaguemarinaelizabeth polarizationconversionfromhighlyconductingasymmetrictrapezoidalgratings
_version_	1768545710412660736

Polarization conversion from highly conducting, asymmetric trapezoidal gratings

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