Patterning of nano-scale arrays by table-top extreme ultraviolet laser interferometric lithography

Arrays of nanodots were directly patterned by interferometric lithography using a bright table-top 46.9 nm laser. Multiple exposures with a Lloyd's mirror interferometer allowed to print arrays of 60 nm FWHM features. This laser-based extreme ultraviolet interferometric technique makes possible...

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Detalles Bibliográficos
Publicado: 2007
Materias:
Array processing
Interferometers
Lithography
Nanoscale patterns
Tabletop set up
Nanostructured materials
Acceso en línea:https://bibliotecadigital.exactas.uba.ar/collection/paper/document/paper_10944087_v15_n6_p3465_Wachulak
http://hdl.handle.net/20.500.12110/paper_10944087_v15_n6_p3465_Wachulak
Aporte de:
Biblioteca Digital - Facultad de Ciencias Exactas y Naturales (UBA) de Universidad de Buenos Aires
id paper:paper_10944087_v15_n6_p3465_Wachulak
record_format dspace
spelling paper:paper_10944087_v15_n6_p3465_Wachulak2023-06-08T16:06:49Z Patterning of nano-scale arrays by table-top extreme ultraviolet laser interferometric lithography Array processing Interferometers Lithography Nanoscale patterns Tabletop set up Nanostructured materials Arrays of nanodots were directly patterned by interferometric lithography using a bright table-top 46.9 nm laser. Multiple exposures with a Lloyd's mirror interferometer allowed to print arrays of 60 nm FWHM features. This laser-based extreme ultraviolet interferometric technique makes possible to print different nanoscale patterns using a compact tabletop set up. © 2007 Optical Society of America. 2007 https://bibliotecadigital.exactas.uba.ar/collection/paper/document/paper_10944087_v15_n6_p3465_Wachulak http://hdl.handle.net/20.500.12110/paper_10944087_v15_n6_p3465_Wachulak
institution Universidad de Buenos Aires
institution_str I-28
repository_str R-134
collection Biblioteca Digital - Facultad de Ciencias Exactas y Naturales (UBA)
topic Array processing
Interferometers
Lithography
Nanoscale patterns
Tabletop set up
Nanostructured materials
spellingShingle Array processing
Interferometers
Lithography
Nanoscale patterns
Tabletop set up
Nanostructured materials
Patterning of nano-scale arrays by table-top extreme ultraviolet laser interferometric lithography
topic_facet Array processing
Interferometers
Lithography
Nanoscale patterns
Tabletop set up
Nanostructured materials
description Arrays of nanodots were directly patterned by interferometric lithography using a bright table-top 46.9 nm laser. Multiple exposures with a Lloyd's mirror interferometer allowed to print arrays of 60 nm FWHM features. This laser-based extreme ultraviolet interferometric technique makes possible to print different nanoscale patterns using a compact tabletop set up. © 2007 Optical Society of America.
title Patterning of nano-scale arrays by table-top extreme ultraviolet laser interferometric lithography
title_short Patterning of nano-scale arrays by table-top extreme ultraviolet laser interferometric lithography
title_full Patterning of nano-scale arrays by table-top extreme ultraviolet laser interferometric lithography
title_fullStr Patterning of nano-scale arrays by table-top extreme ultraviolet laser interferometric lithography
title_full_unstemmed Patterning of nano-scale arrays by table-top extreme ultraviolet laser interferometric lithography
title_sort patterning of nano-scale arrays by table-top extreme ultraviolet laser interferometric lithography
publishDate 2007
url https://bibliotecadigital.exactas.uba.ar/collection/paper/document/paper_10944087_v15_n6_p3465_Wachulak
http://hdl.handle.net/20.500.12110/paper_10944087_v15_n6_p3465_Wachulak
_version_ 1768544239405236224

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