Wide band interferometry for thickness measurement

In this work we present the concept of wide band interferometry as opposed to white-light interferometry to introduce a thickness measurement method that gains precision when the bandwidth is reduced to an adequate compromise in order to avoid the distortions arising from the material dispersion. Th...

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Publicado: 2003
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Acceso en línea:https://bibliotecadigital.exactas.uba.ar/collection/paper/document/paper_10944087_v11_n8_p952_Costantino
http://hdl.handle.net/20.500.12110/paper_10944087_v11_n8_p952_Costantino
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spelling paper:paper_10944087_v11_n8_p952_Costantino2023-06-08T16:06:46Z Wide band interferometry for thickness measurement Algorithms Approximation theory Bandwidth Dispersion (waves) Fast Fourier transforms Frequency modulation Optical glass Optical testing Refractive index Statistical methods Thickness measurement Thin films Gaussian spectrum Optical path difference (OPD) Scanning white-light interferometry (SWLI) Wide band interferometry Interferometry In this work we present the concept of wide band interferometry as opposed to white-light interferometry to introduce a thickness measurement method that gains precision when the bandwidth is reduced to an adequate compromise in order to avoid the distortions arising from the material dispersion. The use of the widest possible band is a well established dogma when the highest resolution is desired in distance measurements with white-light interferometry. We will show that the dogma falls when thickness measurements must be carried out due to material dispersion. In fact the precise knowledge of the frequency dependence of the refractive index is essential for adequate thickness retrieval from the optical experiments. The device we present is also useful to obtain the group refractive index that is necessary to calculate the absolute thickness value. As an example, we show the spreading of a silicone oil on a reference surface in real time. © 2003 Optical Society of America. 2003 https://bibliotecadigital.exactas.uba.ar/collection/paper/document/paper_10944087_v11_n8_p952_Costantino http://hdl.handle.net/20.500.12110/paper_10944087_v11_n8_p952_Costantino
institution Universidad de Buenos Aires
institution_str I-28
repository_str R-134
collection Biblioteca Digital - Facultad de Ciencias Exactas y Naturales (UBA)
topic Algorithms
Approximation theory
Bandwidth
Dispersion (waves)
Fast Fourier transforms
Frequency modulation
Optical glass
Optical testing
Refractive index
Statistical methods
Thickness measurement
Thin films
Gaussian spectrum
Optical path difference (OPD)
Scanning white-light interferometry (SWLI)
Wide band interferometry
Interferometry
spellingShingle Algorithms
Approximation theory
Bandwidth
Dispersion (waves)
Fast Fourier transforms
Frequency modulation
Optical glass
Optical testing
Refractive index
Statistical methods
Thickness measurement
Thin films
Gaussian spectrum
Optical path difference (OPD)
Scanning white-light interferometry (SWLI)
Wide band interferometry
Interferometry
Wide band interferometry for thickness measurement
topic_facet Algorithms
Approximation theory
Bandwidth
Dispersion (waves)
Fast Fourier transforms
Frequency modulation
Optical glass
Optical testing
Refractive index
Statistical methods
Thickness measurement
Thin films
Gaussian spectrum
Optical path difference (OPD)
Scanning white-light interferometry (SWLI)
Wide band interferometry
Interferometry
description In this work we present the concept of wide band interferometry as opposed to white-light interferometry to introduce a thickness measurement method that gains precision when the bandwidth is reduced to an adequate compromise in order to avoid the distortions arising from the material dispersion. The use of the widest possible band is a well established dogma when the highest resolution is desired in distance measurements with white-light interferometry. We will show that the dogma falls when thickness measurements must be carried out due to material dispersion. In fact the precise knowledge of the frequency dependence of the refractive index is essential for adequate thickness retrieval from the optical experiments. The device we present is also useful to obtain the group refractive index that is necessary to calculate the absolute thickness value. As an example, we show the spreading of a silicone oil on a reference surface in real time. © 2003 Optical Society of America.
title Wide band interferometry for thickness measurement
title_short Wide band interferometry for thickness measurement
title_full Wide band interferometry for thickness measurement
title_fullStr Wide band interferometry for thickness measurement
title_full_unstemmed Wide band interferometry for thickness measurement
title_sort wide band interferometry for thickness measurement
publishDate 2003
url https://bibliotecadigital.exactas.uba.ar/collection/paper/document/paper_10944087_v11_n8_p952_Costantino
http://hdl.handle.net/20.500.12110/paper_10944087_v11_n8_p952_Costantino
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