Electrostatic actuation of three-dimensional MEMS mirrors using sidewall electrodes

We propose and demonstrate electrostatic sidewall-electrodes actuation of three-dimensional (3-D) microelectromechanical systems (MEMS) gimbal mirrors. The linearity of the mirror angle dependence on actuation voltage is improved with the sidewall-electrodes actuation. In addition, the undesired spr...

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Detalles Bibliográficos
Publicado:	2004
Materias:	Electrostatic actuation Microelectromechanical systems (MEMS) Optical cross-connect (OXC) Optical switching Sidewall-electrodes Digital to analog conversion Electric potential Electrodes Electrostatic actuators Mirrors Natural frequencies Optical switches Resonance Switching systems Electrostatic fringing fields Optical cross-connects (OXC) Sidewall electrodes Microelectromechanical devices
Acceso en línea:	https://bibliotecadigital.exactas.uba.ar/collection/paper/document/paper_1077260X_v10_n3_p472_Pu http://hdl.handle.net/20.500.12110/paper_1077260X_v10_n3_p472_Pu
Aporte de:	Biblioteca Digital - Facultad de Ciencias Exactas y Naturales (UBA) de Universidad de Buenos Aires

id	paper:paper_1077260X_v10_n3_p472_Pu
record_format	dspace
spelling	paper:paper_1077260X_v10_n3_p472_Pu2023-06-08T16:05:26Z Electrostatic actuation of three-dimensional MEMS mirrors using sidewall electrodes Electrostatic actuation Microelectromechanical systems (MEMS) Optical cross-connect (OXC) Optical switching Sidewall-electrodes Digital to analog conversion Electric potential Electrodes Electrostatic actuators Mirrors Natural frequencies Optical switches Resonance Switching systems Electrostatic fringing fields Optical cross-connects (OXC) Optical switching Sidewall electrodes Microelectromechanical devices We propose and demonstrate electrostatic sidewall-electrodes actuation of three-dimensional (3-D) microelectromechanical systems (MEMS) gimbal mirrors. The linearity of the mirror angle dependence on actuation voltage is improved with the sidewall-electrodes actuation. In addition, the undesired spring-softening effect commonly found in electrostatic actuation, where the mirror resonance frequency decreases with increased tilt angle, is significantly reduced. Sidewall actuation enables superior performance of 3-D MEMS mirrors including large pull-in angles, reduced actuation voltages, improved device reliability, and fast switching times. 2004 https://bibliotecadigital.exactas.uba.ar/collection/paper/document/paper_1077260X_v10_n3_p472_Pu http://hdl.handle.net/20.500.12110/paper_1077260X_v10_n3_p472_Pu
institution	Universidad de Buenos Aires
institution_str	I-28
repository_str	R-134
collection	Biblioteca Digital - Facultad de Ciencias Exactas y Naturales (UBA)
topic	Electrostatic actuation Microelectromechanical systems (MEMS) Optical cross-connect (OXC) Optical switching Sidewall-electrodes Digital to analog conversion Electric potential Electrodes Electrostatic actuators Mirrors Natural frequencies Optical switches Resonance Switching systems Electrostatic fringing fields Optical cross-connects (OXC) Optical switching Sidewall electrodes Microelectromechanical devices
spellingShingle	Electrostatic actuation Microelectromechanical systems (MEMS) Optical cross-connect (OXC) Optical switching Sidewall-electrodes Digital to analog conversion Electric potential Electrodes Electrostatic actuators Mirrors Natural frequencies Optical switches Resonance Switching systems Electrostatic fringing fields Optical cross-connects (OXC) Optical switching Sidewall electrodes Microelectromechanical devices Electrostatic actuation of three-dimensional MEMS mirrors using sidewall electrodes
topic_facet	Electrostatic actuation Microelectromechanical systems (MEMS) Optical cross-connect (OXC) Optical switching Sidewall-electrodes Digital to analog conversion Electric potential Electrodes Electrostatic actuators Mirrors Natural frequencies Optical switches Resonance Switching systems Electrostatic fringing fields Optical cross-connects (OXC) Optical switching Sidewall electrodes Microelectromechanical devices
description	We propose and demonstrate electrostatic sidewall-electrodes actuation of three-dimensional (3-D) microelectromechanical systems (MEMS) gimbal mirrors. The linearity of the mirror angle dependence on actuation voltage is improved with the sidewall-electrodes actuation. In addition, the undesired spring-softening effect commonly found in electrostatic actuation, where the mirror resonance frequency decreases with increased tilt angle, is significantly reduced. Sidewall actuation enables superior performance of 3-D MEMS mirrors including large pull-in angles, reduced actuation voltages, improved device reliability, and fast switching times.
title	Electrostatic actuation of three-dimensional MEMS mirrors using sidewall electrodes
title_short	Electrostatic actuation of three-dimensional MEMS mirrors using sidewall electrodes
title_full	Electrostatic actuation of three-dimensional MEMS mirrors using sidewall electrodes
title_fullStr	Electrostatic actuation of three-dimensional MEMS mirrors using sidewall electrodes
title_full_unstemmed	Electrostatic actuation of three-dimensional MEMS mirrors using sidewall electrodes
title_sort	electrostatic actuation of three-dimensional mems mirrors using sidewall electrodes
publishDate	2004
url	https://bibliotecadigital.exactas.uba.ar/collection/paper/document/paper_1077260X_v10_n3_p472_Pu http://hdl.handle.net/20.500.12110/paper_1077260X_v10_n3_p472_Pu
_version_	1768543288180080640

Electrostatic actuation of three-dimensional MEMS mirrors using sidewall electrodes

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