Ion emission in a dc titanium cathodic arc operated with oxygen
The ion emission and its correlation with the deposition rate in a dc titanium cathodic arc run in an oxygen ambient with a current of 115 A has been investigated. The incoming O 2 flow was varied between 10-60 sccm, resulting in a working pressure of 0.1-10 Pa. The ion saturation current measuremen...
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| Publicado: |
2008
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| Acceso en línea: | https://bibliotecadigital.exactas.uba.ar/collection/paper/document/paper_02811847_vT131_n_p_Kleiman http://hdl.handle.net/20.500.12110/paper_02811847_vT131_n_p_Kleiman |
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