Ion emission in a dc titanium cathodic arc operated with oxygen

The ion emission and its correlation with the deposition rate in a dc titanium cathodic arc run in an oxygen ambient with a current of 115 A has been investigated. The incoming O 2 flow was varied between 10-60 sccm, resulting in a working pressure of 0.1-10 Pa. The ion saturation current measuremen...

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Guardado en:
Detalles Bibliográficos
Publicado: 2008
Materias:
Cathodic arc
Glass substrates
Ion density
Ion emissions
Ion energies
Ion saturation current
Operation parameters
Oxygen ambient
Sticking coefficients
Working pressures
Cavity resonators
Deposition rates
Electric current measurement
Leakage (fluid)
Oxygen
Probes
Titanium
Ions
Acceso en línea:https://bibliotecadigital.exactas.uba.ar/collection/paper/document/paper_02811847_vT131_n_p_Kleiman
http://hdl.handle.net/20.500.12110/paper_02811847_vT131_n_p_Kleiman
Aporte de:
Biblioteca Digital - Facultad de Ciencias Exactas y Naturales (UBA) de Universidad de Buenos Aires
id paper:paper_02811847_vT131_n_p_Kleiman
record_format dspace
spelling paper:paper_02811847_vT131_n_p_Kleiman2023-06-08T15:26:57Z Ion emission in a dc titanium cathodic arc operated with oxygen Cathodic arc Glass substrates Ion density Ion emissions Ion energies Ion saturation current Operation parameters Oxygen ambient Sticking coefficients Working pressures Cavity resonators Deposition rates Electric current measurement Leakage (fluid) Oxygen Probes Titanium Ions The ion emission and its correlation with the deposition rate in a dc titanium cathodic arc run in an oxygen ambient with a current of 115 A has been investigated. The incoming O 2 flow was varied between 10-60 sccm, resulting in a working pressure of 0.1-10 Pa. The ion saturation current measurements were carried out with Langmuir probes located on the system axis at two distances, 20 and 30 cm, from the cathode. The deposition rates were determined by weighting the deposited mass on glass substrates located at the same positions as the probes. The ion density and ion energy were estimated for the different operation parameters. The sticking coefficient for titanium was estimated by using the deposition rate and the ion saturation current. © 2008 The Royal Swedish Academy of Sciences. 2008 https://bibliotecadigital.exactas.uba.ar/collection/paper/document/paper_02811847_vT131_n_p_Kleiman http://hdl.handle.net/20.500.12110/paper_02811847_vT131_n_p_Kleiman
institution Universidad de Buenos Aires
institution_str I-28
repository_str R-134
collection Biblioteca Digital - Facultad de Ciencias Exactas y Naturales (UBA)
topic Cathodic arc
Glass substrates
Ion density
Ion emissions
Ion energies
Ion saturation current
Operation parameters
Oxygen ambient
Sticking coefficients
Working pressures
Cavity resonators
Deposition rates
Electric current measurement
Leakage (fluid)
Oxygen
Probes
Titanium
Ions
spellingShingle Cathodic arc
Glass substrates
Ion density
Ion emissions
Ion energies
Ion saturation current
Operation parameters
Oxygen ambient
Sticking coefficients
Working pressures
Cavity resonators
Deposition rates
Electric current measurement
Leakage (fluid)
Oxygen
Probes
Titanium
Ions
Ion emission in a dc titanium cathodic arc operated with oxygen
topic_facet Cathodic arc
Glass substrates
Ion density
Ion emissions
Ion energies
Ion saturation current
Operation parameters
Oxygen ambient
Sticking coefficients
Working pressures
Cavity resonators
Deposition rates
Electric current measurement
Leakage (fluid)
Oxygen
Probes
Titanium
Ions
description The ion emission and its correlation with the deposition rate in a dc titanium cathodic arc run in an oxygen ambient with a current of 115 A has been investigated. The incoming O 2 flow was varied between 10-60 sccm, resulting in a working pressure of 0.1-10 Pa. The ion saturation current measurements were carried out with Langmuir probes located on the system axis at two distances, 20 and 30 cm, from the cathode. The deposition rates were determined by weighting the deposited mass on glass substrates located at the same positions as the probes. The ion density and ion energy were estimated for the different operation parameters. The sticking coefficient for titanium was estimated by using the deposition rate and the ion saturation current. © 2008 The Royal Swedish Academy of Sciences.
title Ion emission in a dc titanium cathodic arc operated with oxygen
title_short Ion emission in a dc titanium cathodic arc operated with oxygen
title_full Ion emission in a dc titanium cathodic arc operated with oxygen
title_fullStr Ion emission in a dc titanium cathodic arc operated with oxygen
title_full_unstemmed Ion emission in a dc titanium cathodic arc operated with oxygen
title_sort ion emission in a dc titanium cathodic arc operated with oxygen
publishDate 2008
url https://bibliotecadigital.exactas.uba.ar/collection/paper/document/paper_02811847_vT131_n_p_Kleiman
http://hdl.handle.net/20.500.12110/paper_02811847_vT131_n_p_Kleiman
_version_ 1768543897111232512

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