Cita APA (7a ed.)

(2007). Interferometric lithography with sub-100-nm resolution using a tabletop 46.9-nm laser.

Cita Chicago Style (17a ed.)

Interferometric Lithography with Sub-100-nm Resolution Using a Tabletop 46.9-nm Laser. 2007.

Cita MLA (8a ed.)

Interferometric Lithography with Sub-100-nm Resolution Using a Tabletop 46.9-nm Laser. 2007.