Anatase TiO2 films obtained by cathodic arc deposition

TiO2 thin films were prepared on glass substrates at different temperatures employing an unfiltered cathodic arc device. The temperature values were varied from room temperature to 400 °C. The crystalline structure of the films was determined by X-ray diffraction. The surface morphology was studied...

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Autores principales:	Kleiman, Ariel Javier, Marquez, Adriana B., Lamas, Diego Germán
Publicado:	2007
Materias:	Arc evaporation Atomic force microscopy (AFM) Structure Titanium oxide Deposition Grain size and shape Phase transitions Surface morphology Surface roughness Thermal effects Thin films Cathodic arc deposition Crystalline structure Titanium dioxide
Acceso en línea:	https://bibliotecadigital.exactas.uba.ar/collection/paper/document/paper_02578972_v201_n14_p6358_Kleiman http://hdl.handle.net/20.500.12110/paper_02578972_v201_n14_p6358_Kleiman
Aporte de:	Biblioteca Digital - Facultad de Ciencias Exactas y Naturales (UBA) de Universidad de Buenos Aires

id	paper:paper_02578972_v201_n14_p6358_Kleiman
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spelling	paper:paper_02578972_v201_n14_p6358_Kleiman2023-06-08T15:22:04Z Anatase TiO2 films obtained by cathodic arc deposition Kleiman, Ariel Javier Marquez, Adriana B. Lamas, Diego Germán Arc evaporation Atomic force microscopy (AFM) Structure Titanium oxide Deposition Grain size and shape Phase transitions Surface morphology Surface roughness Thermal effects Thin films Arc evaporation Cathodic arc deposition Crystalline structure Titanium dioxide Deposition Grain size and shape Phase transitions Surface morphology Surface roughness Thermal effects Thin films Titanium dioxide TiO2 thin films were prepared on glass substrates at different temperatures employing an unfiltered cathodic arc device. The temperature values were varied from room temperature to 400 °C. The crystalline structure of the films was determined by X-ray diffraction. The surface morphology was studied by scanning electron microscopy and atomic force microscopy. Transmittance in UV-visible region was also measured. All films deposited at temperatures lower than 300 °C were amorphous, whereas films obtained at higher temperatures grew in crystalline anatase phase. Phase transition amorphous-to-anatase was observed after post-annealing at 400 °C. The average transmittance value for all films was higher than 80%, a comparison among the films obtained at different temperatures showed a transmittance value slightly higher for films obtained at highest temperatures. Grain size for as-deposited crystalline films was determined approximately in 20 nm, with a surface roughness of about 2 nm. © 2006 Elsevier B.V. All rights reserved. Fil:Kleiman, A. Universidad de Buenos Aires. Facultad de Ciencias Exactas y Naturales; Argentina. Fil:Márquez, A. Universidad de Buenos Aires. Facultad de Ciencias Exactas y Naturales; Argentina. Fil:Lamas, D.G. Universidad de Buenos Aires. Facultad de Ciencias Exactas y Naturales; Argentina. 2007 https://bibliotecadigital.exactas.uba.ar/collection/paper/document/paper_02578972_v201_n14_p6358_Kleiman http://hdl.handle.net/20.500.12110/paper_02578972_v201_n14_p6358_Kleiman
institution	Universidad de Buenos Aires
institution_str	I-28
repository_str	R-134
collection	Biblioteca Digital - Facultad de Ciencias Exactas y Naturales (UBA)
topic	Arc evaporation Atomic force microscopy (AFM) Structure Titanium oxide Deposition Grain size and shape Phase transitions Surface morphology Surface roughness Thermal effects Thin films Arc evaporation Cathodic arc deposition Crystalline structure Titanium dioxide Deposition Grain size and shape Phase transitions Surface morphology Surface roughness Thermal effects Thin films Titanium dioxide
spellingShingle	Arc evaporation Atomic force microscopy (AFM) Structure Titanium oxide Deposition Grain size and shape Phase transitions Surface morphology Surface roughness Thermal effects Thin films Arc evaporation Cathodic arc deposition Crystalline structure Titanium dioxide Deposition Grain size and shape Phase transitions Surface morphology Surface roughness Thermal effects Thin films Titanium dioxide Kleiman, Ariel Javier Marquez, Adriana B. Lamas, Diego Germán Anatase TiO2 films obtained by cathodic arc deposition
topic_facet	Arc evaporation Atomic force microscopy (AFM) Structure Titanium oxide Deposition Grain size and shape Phase transitions Surface morphology Surface roughness Thermal effects Thin films Arc evaporation Cathodic arc deposition Crystalline structure Titanium dioxide Deposition Grain size and shape Phase transitions Surface morphology Surface roughness Thermal effects Thin films Titanium dioxide
description	TiO2 thin films were prepared on glass substrates at different temperatures employing an unfiltered cathodic arc device. The temperature values were varied from room temperature to 400 °C. The crystalline structure of the films was determined by X-ray diffraction. The surface morphology was studied by scanning electron microscopy and atomic force microscopy. Transmittance in UV-visible region was also measured. All films deposited at temperatures lower than 300 °C were amorphous, whereas films obtained at higher temperatures grew in crystalline anatase phase. Phase transition amorphous-to-anatase was observed after post-annealing at 400 °C. The average transmittance value for all films was higher than 80%, a comparison among the films obtained at different temperatures showed a transmittance value slightly higher for films obtained at highest temperatures. Grain size for as-deposited crystalline films was determined approximately in 20 nm, with a surface roughness of about 2 nm. © 2006 Elsevier B.V. All rights reserved.
author	Kleiman, Ariel Javier Marquez, Adriana B. Lamas, Diego Germán
author_facet	Kleiman, Ariel Javier Marquez, Adriana B. Lamas, Diego Germán
author_sort	Kleiman, Ariel Javier
title	Anatase TiO2 films obtained by cathodic arc deposition
title_short	Anatase TiO2 films obtained by cathodic arc deposition
title_full	Anatase TiO2 films obtained by cathodic arc deposition
title_fullStr	Anatase TiO2 films obtained by cathodic arc deposition
title_full_unstemmed	Anatase TiO2 films obtained by cathodic arc deposition
title_sort	anatase tio2 films obtained by cathodic arc deposition
publishDate	2007
url	https://bibliotecadigital.exactas.uba.ar/collection/paper/document/paper_02578972_v201_n14_p6358_Kleiman http://hdl.handle.net/20.500.12110/paper_02578972_v201_n14_p6358_Kleiman
work_keys_str_mv	AT kleimanarieljavier anatasetio2filmsobtainedbycathodicarcdeposition AT marquezadrianab anatasetio2filmsobtainedbycathodicarcdeposition AT lamasdiegogerman anatasetio2filmsobtainedbycathodicarcdeposition
_version_	1768546581590573056

Anatase TiO2 films obtained by cathodic arc deposition

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