Influence of the pre-treatments and process temperature on the adhesion of TiN films deposited by PBII&D over nitrided austenitic stainless steel

In this work the influence of pre-treatment cleaning processes in the adhesion of TiN films deposited by the plasma based ion implantation and deposition (PBII&D) process over plasma nitrided AISI 316L stainless steel was investigated, varying the gas composition, the duration of the sputtering...

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Autores principales: Vaca, Laura Silvia, Quintana, Juan Pablo, Guitar, María Agustina, Vega, Daniel, Brühl, Sonia Patricia, Márquez, Adriana Beatriz
Formato: Artículo publisherVersion info:ar-repo/semantics/art??culo
Lenguaje:Inglés
Publicado: 2020
Materias:
Acceso en línea:http://www.scielo.br/scielo.php?script=sci_arttext&pid=S1516-14392019000500217&tlng=en
http://hdl.handle.net/20.500.12272/4625
http://dx.doi.org/10.1590/1980-5373-mr-2019-0282
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id I68-R174-20.500.12272-4625
record_format dspace
institution Universidad Tecnológica Nacional
institution_str I-68
repository_str R-174
collection RIA - Repositorio Institucional Abierto (UTN)
language Inglés
topic PBII&D
TiN films
Adhesion
Duplex treatment
spellingShingle PBII&D
TiN films
Adhesion
Duplex treatment
Vaca, Laura Silvia
Quintana, Juan Pablo
Guitar, María Agustina
Vega, Daniel
Brühl, Sonia Patricia
Márquez, Adriana Beatriz
Influence of the pre-treatments and process temperature on the adhesion of TiN films deposited by PBII&D over nitrided austenitic stainless steel
topic_facet PBII&D
TiN films
Adhesion
Duplex treatment
description In this work the influence of pre-treatment cleaning processes in the adhesion of TiN films deposited by the plasma based ion implantation and deposition (PBII&D) process over plasma nitrided AISI 316L stainless steel was investigated, varying the gas composition, the duration of the sputtering process and the temperature in the same deposition chamber. The TiN film morphology was scrutinized with scanning electron microscopy on the surface complemented with focus ion beam for the cross section. The film microstructure was characterized with X ray diffraction. The adhesion of the coatings was studied using the Scratch Test with constant load at different values and the Rockwell C indentation method as well. It was found that only with the sputtering carried out in a H - Ar gas mixing at 300 ºC temperature used as pre-treatment was successful to prepare the nitrided surface for the subsequent TiN deposition by the PBII&D process.
format Artículo
publisherVersion
info:ar-repo/semantics/art??culo
author Vaca, Laura Silvia
Quintana, Juan Pablo
Guitar, María Agustina
Vega, Daniel
Brühl, Sonia Patricia
Márquez, Adriana Beatriz
author_facet Vaca, Laura Silvia
Quintana, Juan Pablo
Guitar, María Agustina
Vega, Daniel
Brühl, Sonia Patricia
Márquez, Adriana Beatriz
author_sort Vaca, Laura Silvia
title Influence of the pre-treatments and process temperature on the adhesion of TiN films deposited by PBII&D over nitrided austenitic stainless steel
title_short Influence of the pre-treatments and process temperature on the adhesion of TiN films deposited by PBII&D over nitrided austenitic stainless steel
title_full Influence of the pre-treatments and process temperature on the adhesion of TiN films deposited by PBII&D over nitrided austenitic stainless steel
title_fullStr Influence of the pre-treatments and process temperature on the adhesion of TiN films deposited by PBII&D over nitrided austenitic stainless steel
title_full_unstemmed Influence of the pre-treatments and process temperature on the adhesion of TiN films deposited by PBII&D over nitrided austenitic stainless steel
title_sort influence of the pre-treatments and process temperature on the adhesion of tin films deposited by pbii&d over nitrided austenitic stainless steel
publishDate 2020
url http://www.scielo.br/scielo.php?script=sci_arttext&pid=S1516-14392019000500217&tlng=en
http://hdl.handle.net/20.500.12272/4625
http://dx.doi.org/10.1590/1980-5373-mr-2019-0282
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