Simple method for thickness measurement in opaque samples with a Michelson-Sagnac interferometer
We present in this work a method to measure thicknesses of opaque samples. The technique combines the use of low coherence interferometry with a Michelson-Sagnac configuration. This ring set-up let us to measure both faces of the sample simultaneously. So it is possible to obtain the thickness by m...
Guardado en:
| Autores principales: | , |
|---|---|
| Formato: | Documento de conferencia publishedVersion |
| Lenguaje: | Inglés |
| Publicado: |
2020
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| Materias: | |
| Acceso en línea: | http://hdl.handle.net/20.500.12272/4481 |
| Aporte de: |
| id |
I68-R174-20.500.12272-4481 |
|---|---|
| record_format |
dspace |
| institution |
Universidad Tecnológica Nacional |
| institution_str |
I-68 |
| repository_str |
R-174 |
| collection |
RIA - Repositorio Institucional Abierto (UTN) |
| language |
Inglés |
| topic |
UTN FRD Coherence Interferometry Michelson-Sagnac configuration |
| spellingShingle |
UTN FRD Coherence Interferometry Michelson-Sagnac configuration Morel, Eneas Torga, Jorge Simple method for thickness measurement in opaque samples with a Michelson-Sagnac interferometer |
| topic_facet |
UTN FRD Coherence Interferometry Michelson-Sagnac configuration |
| description |
We present in this work a method to measure thicknesses of opaque samples. The technique combines the use of low coherence interferometry with a Michelson-Sagnac configuration. This ring set-up let us to measure both faces of the sample
simultaneously. So it is possible to obtain the thickness by measuring the optical path difference between a reference and both surfaces of the sample. Experimental results up to 1mm are shown in metal gauge block. A resolution better than 10 micronswas
obtained. |
| format |
Documento de conferencia publishedVersion |
| author |
Morel, Eneas Torga, Jorge |
| author_facet |
Morel, Eneas Torga, Jorge |
| author_sort |
Morel, Eneas |
| title |
Simple method for thickness measurement in opaque samples with a Michelson-Sagnac interferometer |
| title_short |
Simple method for thickness measurement in opaque samples with a Michelson-Sagnac interferometer |
| title_full |
Simple method for thickness measurement in opaque samples with a Michelson-Sagnac interferometer |
| title_fullStr |
Simple method for thickness measurement in opaque samples with a Michelson-Sagnac interferometer |
| title_full_unstemmed |
Simple method for thickness measurement in opaque samples with a Michelson-Sagnac interferometer |
| title_sort |
simple method for thickness measurement in opaque samples with a michelson-sagnac interferometer |
| publishDate |
2020 |
| url |
http://hdl.handle.net/20.500.12272/4481 |
| work_keys_str_mv |
AT moreleneas simplemethodforthicknessmeasurementinopaquesampleswithamichelsonsagnacinterferometer AT torgajorge simplemethodforthicknessmeasurementinopaquesampleswithamichelsonsagnacinterferometer |
| bdutipo_str |
Repositorios |
| _version_ |
1764820551857078275 |