Simple method for thickness measurement in opaque samples with a Michelson-Sagnac interferometer

We present in this work a method to measure thicknesses of opaque samples. The technique combines the use of low coherence interferometry with a Michelson-Sagnac configuration. This ring set-up let us to measure both faces of the sample simultaneously. So it is possible to obtain the thickness by m...

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Detalles Bibliográficos
Autores principales: Morel, Eneas, Torga, Jorge
Formato: Documento de conferencia publishedVersion
Lenguaje:Inglés
Publicado: 2020
Materias:
UTN
FRD
Acceso en línea:http://hdl.handle.net/20.500.12272/4481
Aporte de:
id I68-R174-20.500.12272-4481
record_format dspace
institution Universidad Tecnológica Nacional
institution_str I-68
repository_str R-174
collection RIA - Repositorio Institucional Abierto (UTN)
language Inglés
topic UTN
FRD
Coherence Interferometry
Michelson-Sagnac configuration
spellingShingle UTN
FRD
Coherence Interferometry
Michelson-Sagnac configuration
Morel, Eneas
Torga, Jorge
Simple method for thickness measurement in opaque samples with a Michelson-Sagnac interferometer
topic_facet UTN
FRD
Coherence Interferometry
Michelson-Sagnac configuration
description We present in this work a method to measure thicknesses of opaque samples. The technique combines the use of low coherence interferometry with a Michelson-Sagnac configuration. This ring set-up let us to measure both faces of the sample simultaneously. So it is possible to obtain the thickness by measuring the optical path difference between a reference and both surfaces of the sample. Experimental results up to 1mm are shown in metal gauge block. A resolution better than 10 micronswas obtained.
format Documento de conferencia
publishedVersion
author Morel, Eneas
Torga, Jorge
author_facet Morel, Eneas
Torga, Jorge
author_sort Morel, Eneas
title Simple method for thickness measurement in opaque samples with a Michelson-Sagnac interferometer
title_short Simple method for thickness measurement in opaque samples with a Michelson-Sagnac interferometer
title_full Simple method for thickness measurement in opaque samples with a Michelson-Sagnac interferometer
title_fullStr Simple method for thickness measurement in opaque samples with a Michelson-Sagnac interferometer
title_full_unstemmed Simple method for thickness measurement in opaque samples with a Michelson-Sagnac interferometer
title_sort simple method for thickness measurement in opaque samples with a michelson-sagnac interferometer
publishDate 2020
url http://hdl.handle.net/20.500.12272/4481
work_keys_str_mv AT moreleneas simplemethodforthicknessmeasurementinopaquesampleswithamichelsonsagnacinterferometer
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