Transparent glass slab thickness measurement by binary-spot focus signal

Focus error systems based on the astigmatic principle relying on four quadrant photo detectors as the signal generation element have widely been used in many different applications. Nevertheless, its working principle is not particularly suitable for measurements involving more than one spot. In t...

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Detalles Bibliográficos
Autores principales: Aguilar, Andrés, Torga, Jorge
Formato: Artículo publishedVersion
Lenguaje:Inglés
Publicado: 2020
Materias:
UTN
FRD
Focus-Error-Signal
Astigmatic
Thickness
Beam profilometer
Multiple spots
Acceso en línea:http://hdl.handle.net/20.500.12272/4473
Aporte de:
RIA - Repositorio Institucional Abierto (UTN) de Universidad Tecnológica Nacional
id I68-R174-20.500.12272-4473
record_format dspace
institution Universidad Tecnológica Nacional
institution_str I-68
repository_str R-174
collection RIA - Repositorio Institucional Abierto (UTN)
language Inglés
topic UTN
FRD
Focus-Error-Signal
Astigmatic
Thickness
Beam profilometer
Multiple spots
spellingShingle UTN
FRD
Focus-Error-Signal
Astigmatic
Thickness
Beam profilometer
Multiple spots
Aguilar, Andrés
Torga, Jorge
Transparent glass slab thickness measurement by binary-spot focus signal
topic_facet UTN
FRD
Focus-Error-Signal
Astigmatic
Thickness
Beam profilometer
Multiple spots
description Focus error systems based on the astigmatic principle relying on four quadrant photo detectors as the signal generation element have widely been used in many different applications. Nevertheless, its working principle is not particularly suitable for measurements involving more than one spot. In this work we propose a new method that uses a CCD as the detection device as well as a method of processing acquired data. A side effect of this change is the loss of the FES parameter key to these techniques. To overcome this issue a new parameter named focus signal is proposed. The thickness measuring process of a transparent sample with two reflective layers using this technique is also presented.
format Artículo
publishedVersion
author Aguilar, Andrés
Torga, Jorge
author_facet Aguilar, Andrés
Torga, Jorge
author_sort Aguilar, Andrés
title Transparent glass slab thickness measurement by binary-spot focus signal
title_short Transparent glass slab thickness measurement by binary-spot focus signal
title_full Transparent glass slab thickness measurement by binary-spot focus signal
title_fullStr Transparent glass slab thickness measurement by binary-spot focus signal
title_full_unstemmed Transparent glass slab thickness measurement by binary-spot focus signal
title_sort transparent glass slab thickness measurement by binary-spot focus signal
publishDate 2020
url http://hdl.handle.net/20.500.12272/4473
work_keys_str_mv AT aguilarandres transparentglassslabthicknessmeasurementbybinaryspotfocussignal
AT torgajorge transparentglassslabthicknessmeasurementbybinaryspotfocussignal
bdutipo_str Repositorios
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