Study of the efficiency of magnetic island macroparticle filters for different vacuum arc configurations
In the present work, we studied the efficiency of a magnetic island filter for two vacuum arc designs, pulsed and continuous. The magnetic island filter consisted in a straight duct with an external solenoid and a magnet enclosed in a housing (magnetic island) located inside the duct on its axis, an...
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| Autores principales: | , , , , , |
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| Formato: | Documento de conferencia publishedVersion |
| Publicado: |
2012
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| Materias: | |
| Acceso en línea: | http://hdl.handle.net/20.500.12110/paper_17426588_v370_n1_p_Duran https://repositoriouba.sisbi.uba.ar/gsdl/cgi-bin/library.cgi?a=d&c=artiaex&d=paper_17426588_v370_n1_p_Duran_oai |
| Aporte de: |
| Sumario: | In the present work, we studied the efficiency of a magnetic island filter for two vacuum arc designs, pulsed and continuous. The magnetic island filter consisted in a straight duct with an external solenoid and a magnet enclosed in a housing (magnetic island) located inside the duct on its axis, and both magnetic fields are in opposite direction. The housing of the magnetic island obstructs the line of sight between the cathode and the substrate. In this arrangement, the charged plasma components move along the curved magnetic field lines, around the magnetic island, but the macroparticles move in straight paths and deposit on the wall of the magnetic island housing. The performance of the filter was characterized for different external and internal field strengths. The plasma transport efficiency was analyzed by measuring the ion saturation current with Langmuir probes and the deposited mass rate. The ion transmission efficiency around the system axis achieved values around 25%. Observation of the coating surface morphology with optical microscopy determined that the macroparticles were effectively removed. |
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