Study of the efficiency of magnetic island macroparticle filters for different vacuum arc configurations
In the present work, we studied the efficiency of a magnetic island filter for two vacuum arc designs, pulsed and continuous. The magnetic island filter consisted in a straight duct with an external solenoid and a magnet enclosed in a housing (magnetic island) located inside the duct on its axis, an...
Guardado en:
| Autores principales: | , , , , , |
|---|---|
| Formato: | Documento de conferencia publishedVersion |
| Publicado: |
2012
|
| Materias: | |
| Acceso en línea: | http://hdl.handle.net/20.500.12110/paper_17426588_v370_n1_p_Duran http://repositoriouba.sisbi.uba.ar/gsdl/cgi-bin/library.cgi?a=d&c=artiaex&d=paper_17426588_v370_n1_p_Duran_oai |
| Aporte de: |
| id |
I28-R145-paper_17426588_v370_n1_p_Duran_oai |
|---|---|
| record_format |
dspace |
| spelling |
I28-R145-paper_17426588_v370_n1_p_Duran_oai2020-10-19 Duran, A.A. Fazio, M. Kleiman, A. Giuliani, L. Marquez, A. Grondona, D. 2012 In the present work, we studied the efficiency of a magnetic island filter for two vacuum arc designs, pulsed and continuous. The magnetic island filter consisted in a straight duct with an external solenoid and a magnet enclosed in a housing (magnetic island) located inside the duct on its axis, and both magnetic fields are in opposite direction. The housing of the magnetic island obstructs the line of sight between the cathode and the substrate. In this arrangement, the charged plasma components move along the curved magnetic field lines, around the magnetic island, but the macroparticles move in straight paths and deposit on the wall of the magnetic island housing. The performance of the filter was characterized for different external and internal field strengths. The plasma transport efficiency was analyzed by measuring the ion saturation current with Langmuir probes and the deposited mass rate. The ion transmission efficiency around the system axis achieved values around 25%. Observation of the coating surface morphology with optical microscopy determined that the macroparticles were effectively removed. Fil:Fazio, M. Universidad de Buenos Aires. Facultad de Ciencias Exactas y Naturales; Argentina. Fil:Kleiman, A. Universidad de Buenos Aires. Facultad de Ciencias Exactas y Naturales; Argentina. Fil:Giuliani, L. Universidad de Buenos Aires. Facultad de Ciencias Exactas y Naturales; Argentina. Fil:Marquez, A. Universidad de Buenos Aires. Facultad de Ciencias Exactas y Naturales; Argentina. Fil:Grondona, D. Universidad de Buenos Aires. Facultad de Ciencias Exactas y Naturales; Argentina. application/pdf http://hdl.handle.net/20.500.12110/paper_17426588_v370_n1_p_Duran info:eu-repo/semantics/openAccess http://creativecommons.org/licenses/by/2.5/ar J. Phys. Conf. Ser. 2012;370(1) Bandpass filters Ducts Efficiency Housing Magnetic fields Magnetism Vacuum applications Vacuum technology Coating surface morphologies Ion saturation current Ion transmission efficiency Macro-particles Macroparticle filter Magnetic field line Magnetic island Plasma transport Magnetoplasma Study of the efficiency of magnetic island macroparticle filters for different vacuum arc configurations info:eu-repo/semantics/conferenceObject info:ar-repo/semantics/documento de conferencia info:eu-repo/semantics/publishedVersion http://repositoriouba.sisbi.uba.ar/gsdl/cgi-bin/library.cgi?a=d&c=artiaex&d=paper_17426588_v370_n1_p_Duran_oai |
| institution |
Universidad de Buenos Aires |
| institution_str |
I-28 |
| repository_str |
R-145 |
| collection |
Repositorio Digital de la Universidad de Buenos Aires (UBA) |
| topic |
Bandpass filters Ducts Efficiency Housing Magnetic fields Magnetism Vacuum applications Vacuum technology Coating surface morphologies Ion saturation current Ion transmission efficiency Macro-particles Macroparticle filter Magnetic field line Magnetic island Plasma transport Magnetoplasma |
| spellingShingle |
Bandpass filters Ducts Efficiency Housing Magnetic fields Magnetism Vacuum applications Vacuum technology Coating surface morphologies Ion saturation current Ion transmission efficiency Macro-particles Macroparticle filter Magnetic field line Magnetic island Plasma transport Magnetoplasma Duran, A.A. Fazio, M. Kleiman, A. Giuliani, L. Marquez, A. Grondona, D. Study of the efficiency of magnetic island macroparticle filters for different vacuum arc configurations |
| topic_facet |
Bandpass filters Ducts Efficiency Housing Magnetic fields Magnetism Vacuum applications Vacuum technology Coating surface morphologies Ion saturation current Ion transmission efficiency Macro-particles Macroparticle filter Magnetic field line Magnetic island Plasma transport Magnetoplasma |
| description |
In the present work, we studied the efficiency of a magnetic island filter for two vacuum arc designs, pulsed and continuous. The magnetic island filter consisted in a straight duct with an external solenoid and a magnet enclosed in a housing (magnetic island) located inside the duct on its axis, and both magnetic fields are in opposite direction. The housing of the magnetic island obstructs the line of sight between the cathode and the substrate. In this arrangement, the charged plasma components move along the curved magnetic field lines, around the magnetic island, but the macroparticles move in straight paths and deposit on the wall of the magnetic island housing. The performance of the filter was characterized for different external and internal field strengths. The plasma transport efficiency was analyzed by measuring the ion saturation current with Langmuir probes and the deposited mass rate. The ion transmission efficiency around the system axis achieved values around 25%. Observation of the coating surface morphology with optical microscopy determined that the macroparticles were effectively removed. |
| format |
Documento de conferencia Documento de conferencia publishedVersion |
| author |
Duran, A.A. Fazio, M. Kleiman, A. Giuliani, L. Marquez, A. Grondona, D. |
| author_facet |
Duran, A.A. Fazio, M. Kleiman, A. Giuliani, L. Marquez, A. Grondona, D. |
| author_sort |
Duran, A.A. |
| title |
Study of the efficiency of magnetic island macroparticle filters for different vacuum arc configurations |
| title_short |
Study of the efficiency of magnetic island macroparticle filters for different vacuum arc configurations |
| title_full |
Study of the efficiency of magnetic island macroparticle filters for different vacuum arc configurations |
| title_fullStr |
Study of the efficiency of magnetic island macroparticle filters for different vacuum arc configurations |
| title_full_unstemmed |
Study of the efficiency of magnetic island macroparticle filters for different vacuum arc configurations |
| title_sort |
study of the efficiency of magnetic island macroparticle filters for different vacuum arc configurations |
| publishDate |
2012 |
| url |
http://hdl.handle.net/20.500.12110/paper_17426588_v370_n1_p_Duran http://repositoriouba.sisbi.uba.ar/gsdl/cgi-bin/library.cgi?a=d&c=artiaex&d=paper_17426588_v370_n1_p_Duran_oai |
| work_keys_str_mv |
AT duranaa studyoftheefficiencyofmagneticislandmacroparticlefiltersfordifferentvacuumarcconfigurations AT faziom studyoftheefficiencyofmagneticislandmacroparticlefiltersfordifferentvacuumarcconfigurations AT kleimana studyoftheefficiencyofmagneticislandmacroparticlefiltersfordifferentvacuumarcconfigurations AT giulianil studyoftheefficiencyofmagneticislandmacroparticlefiltersfordifferentvacuumarcconfigurations AT marqueza studyoftheefficiencyofmagneticislandmacroparticlefiltersfordifferentvacuumarcconfigurations AT grondonad studyoftheefficiencyofmagneticislandmacroparticlefiltersfordifferentvacuumarcconfigurations |
| _version_ |
1766026794801037312 |