Design and Evaluation of a Hall Sensor with Different Hall Plate Geometries in a 0.5µm CMOS Process

An integrated Hall sensor was designed and fabricated in a 0.5μm CMOS ONC5N/F process provided by MOSIS. On it, four different Hall Plate geometries were integrated in order to analyze their sensitivity and resistance over temperature from -40°C up to 165°C. Furthermore, an amplifier and a current s...

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Autores principales: Ronis, Nicolás, García Inza, Mariano
Formato: Artículo publishedVersion
Lenguaje:Inglés
Publicado: Universidad de Buenos Aires. Facultad de Ingeniería 2017
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Acceso en línea:https://elektron.fi.uba.ar/index.php/elektron/article/view/5
https://repositoriouba.sisbi.uba.ar/gsdl/cgi-bin/library.cgi?a=d&c=elektron&d=5_oai
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spelling I28-R145-5_oai2025-06-26 Ronis, Nicolás García Inza, Mariano 2017-07-10 An integrated Hall sensor was designed and fabricated in a 0.5μm CMOS ONC5N/F process provided by MOSIS. On it, four different Hall Plate geometries were integrated in order to analyze their sensitivity and resistance over temperature from -40°C up to 165°C. Furthermore, an amplifier and a current spinning system to remove the amplifier and Hall Plate offset were designed and placed in the same chip. The results show a better sensitivity performance in the cross-shaped Hall Plate and a linear behavior of the sensor in the range of operation tested. Un sensor Hall integrado fue diseñado y fabricado en un proceso CMOS ONC5N/F de 0.5μm provisto por MOSIS. Dentro del mismo, cuatro placas Hall con distintas geometrías fueron integradas con el objetivo de analizar su sensibilidad y resistencia desde -40°C hasta 165°C. Dentro del mismo chip también se integraron y diseñaron un amplificador y un sistema de rotación de corriente para remover su offset. Los resultados muestran una mayor sensibilidad en la placa Hall con forma de cruz y un comportamiento lineal del sensor dentro de su rango de operación. application/pdf https://elektron.fi.uba.ar/index.php/elektron/article/view/5 10.37537/rev.elektron.1.1.5.2017 eng Universidad de Buenos Aires. Facultad de Ingeniería https://elektron.fi.uba.ar/index.php/elektron/article/view/5/21 https://elektron.fi.uba.ar/index.php/elektron/article/view/5/165 info:eu-repo/semantics/openAccess http://creativecommons.org/licenses/by-nc-nd/4.0 Elektron; Vol 1, No 1 (2017) 2525-0159 Hall Plate; CMOS design; Solid state magnetic field sensor. Hall Plate; CMOS diseño; Sensor de campo magnético de estado sólido. Design and Evaluation of a Hall Sensor with Different Hall Plate Geometries in a 0.5µm CMOS Process info:eu-repo/semantics/article info:eu-repo/semantics/publishedVersion info:ar-repo/semantics/artículo https://repositoriouba.sisbi.uba.ar/gsdl/cgi-bin/library.cgi?a=d&c=elektron&d=5_oai
institution Universidad de Buenos Aires
institution_str I-28
repository_str R-145
collection Repositorio Digital de la Universidad de Buenos Aires (UBA)
language Inglés
orig_language_str_mv eng
topic Hall Plate; CMOS design; Solid state magnetic field sensor.
Hall Plate; CMOS diseño; Sensor de campo magnético de estado sólido.
spellingShingle Hall Plate; CMOS design; Solid state magnetic field sensor.
Hall Plate; CMOS diseño; Sensor de campo magnético de estado sólido.
Ronis, Nicolás
García Inza, Mariano
Design and Evaluation of a Hall Sensor with Different Hall Plate Geometries in a 0.5µm CMOS Process
topic_facet Hall Plate; CMOS design; Solid state magnetic field sensor.
Hall Plate; CMOS diseño; Sensor de campo magnético de estado sólido.
description An integrated Hall sensor was designed and fabricated in a 0.5μm CMOS ONC5N/F process provided by MOSIS. On it, four different Hall Plate geometries were integrated in order to analyze their sensitivity and resistance over temperature from -40°C up to 165°C. Furthermore, an amplifier and a current spinning system to remove the amplifier and Hall Plate offset were designed and placed in the same chip. The results show a better sensitivity performance in the cross-shaped Hall Plate and a linear behavior of the sensor in the range of operation tested.
format Artículo
publishedVersion
Artículo
author Ronis, Nicolás
García Inza, Mariano
author_facet Ronis, Nicolás
García Inza, Mariano
author_sort Ronis, Nicolás
title Design and Evaluation of a Hall Sensor with Different Hall Plate Geometries in a 0.5µm CMOS Process
title_short Design and Evaluation of a Hall Sensor with Different Hall Plate Geometries in a 0.5µm CMOS Process
title_full Design and Evaluation of a Hall Sensor with Different Hall Plate Geometries in a 0.5µm CMOS Process
title_fullStr Design and Evaluation of a Hall Sensor with Different Hall Plate Geometries in a 0.5µm CMOS Process
title_full_unstemmed Design and Evaluation of a Hall Sensor with Different Hall Plate Geometries in a 0.5µm CMOS Process
title_sort design and evaluation of a hall sensor with different hall plate geometries in a 0.5µm cmos process
publisher Universidad de Buenos Aires. Facultad de Ingeniería
publishDate 2017
url https://elektron.fi.uba.ar/index.php/elektron/article/view/5
https://repositoriouba.sisbi.uba.ar/gsdl/cgi-bin/library.cgi?a=d&c=elektron&d=5_oai
work_keys_str_mv AT ronisnicolas designandevaluationofahallsensorwithdifferenthallplategeometriesina05μmcmosprocess
AT garciainzamariano designandevaluationofahallsensorwithdifferenthallplategeometriesina05μmcmosprocess
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