Design and Evaluation of a Hall Sensor with Different Hall Plate Geometries in a 0.5µm CMOS Process

An integrated Hall sensor was designed and fabricated in a 0.5μm CMOS ONC5N/F process provided by MOSIS. On it, four different Hall Plate geometries were integrated in order to analyze their sensitivity and resistance over temperature from -40°C up to 165°C. Furthermore, an amplifier and a current s...

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Autores principales: Ronis, Nicolás, García Inza, Mariano
Formato: Artículo publishedVersion
Lenguaje:Inglés
Publicado: FIUBA 2017
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Acceso en línea:https://elektron.fi.uba.ar/elektron/article/view/5
https://repositoriouba.sisbi.uba.ar/gsdl/cgi-bin/library.cgi?a=d&c=elektron&d=5_oai
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spelling I28-R145-5_oai2026-02-11 Ronis, Nicolás García Inza, Mariano 2017-07-10 An integrated Hall sensor was designed and fabricated in a 0.5μm CMOS ONC5N/F process provided by MOSIS. On it, four different Hall Plate geometries were integrated in order to analyze their sensitivity and resistance over temperature from -40°C up to 165°C. Furthermore, an amplifier and a current spinning system to remove the amplifier and Hall Plate offset were designed and placed in the same chip. The results show a better sensitivity performance in the cross-shaped Hall Plate and a linear behavior of the sensor in the range of operation tested. Un sensor Hall integrado fue diseñado y fabricado en un proceso CMOS ONC5N/F de 0.5μm provisto por MOSIS. Dentro del mismo, cuatro placas Hall con distintas geometrías fueron integradas con el objetivo de analizar su sensibilidad y resistencia desde -40°C hasta 165°C. Dentro del mismo chip también se integraron y diseñaron un amplificador y un sistema de rotación de corriente para remover su offset. Los resultados muestran una mayor sensibilidad en la placa Hall con forma de cruz y un comportamiento lineal del sensor dentro de su rango de operación. application/pdf text/html https://elektron.fi.uba.ar/elektron/article/view/5 10.37537/rev.elektron.1.1.5.2017 eng FIUBA https://elektron.fi.uba.ar/elektron/article/view/5/21 https://elektron.fi.uba.ar/elektron/article/view/5/165 Derechos de autor 2017 Nicolás Ronis Elektron Journal; Vol. 1 No. 1 (2017); 1-7 Revista Elektron; Vol. 1 Núm. 1 (2017); 1-7 Revista Elektron; v. 1 n. 1 (2017); 1-7 2525-0159 2525-0159 Hall Plate CMOS design Solid state magnetic field sensor. Hall Plate CMOS diseño Sensor de campo magnético de estado sólido. Design and Evaluation of a Hall Sensor with Different Hall Plate Geometries in a 0.5µm CMOS Process Diseño y evaluación de un sensor Hall con diferentes geometrías de placas Hall en un proceso CMOS de 0,5 μm info:eu-repo/semantics/article info:eu-repo/semantics/publishedVersion https://repositoriouba.sisbi.uba.ar/gsdl/cgi-bin/library.cgi?a=d&c=elektron&d=5_oai
institution Universidad de Buenos Aires
institution_str I-28
repository_str R-145
collection Repositorio Digital de la Universidad de Buenos Aires (UBA)
language Inglés
orig_language_str_mv eng
topic Hall Plate
CMOS design
Solid state magnetic field sensor.
Hall Plate
CMOS diseño
Sensor de campo magnético de estado sólido.
spellingShingle Hall Plate
CMOS design
Solid state magnetic field sensor.
Hall Plate
CMOS diseño
Sensor de campo magnético de estado sólido.
Ronis, Nicolás
García Inza, Mariano
Design and Evaluation of a Hall Sensor with Different Hall Plate Geometries in a 0.5µm CMOS Process
topic_facet Hall Plate
CMOS design
Solid state magnetic field sensor.
Hall Plate
CMOS diseño
Sensor de campo magnético de estado sólido.
description An integrated Hall sensor was designed and fabricated in a 0.5μm CMOS ONC5N/F process provided by MOSIS. On it, four different Hall Plate geometries were integrated in order to analyze their sensitivity and resistance over temperature from -40°C up to 165°C. Furthermore, an amplifier and a current spinning system to remove the amplifier and Hall Plate offset were designed and placed in the same chip. The results show a better sensitivity performance in the cross-shaped Hall Plate and a linear behavior of the sensor in the range of operation tested.
format Artículo
publishedVersion
author Ronis, Nicolás
García Inza, Mariano
author_facet Ronis, Nicolás
García Inza, Mariano
author_sort Ronis, Nicolás
title Design and Evaluation of a Hall Sensor with Different Hall Plate Geometries in a 0.5µm CMOS Process
title_short Design and Evaluation of a Hall Sensor with Different Hall Plate Geometries in a 0.5µm CMOS Process
title_full Design and Evaluation of a Hall Sensor with Different Hall Plate Geometries in a 0.5µm CMOS Process
title_fullStr Design and Evaluation of a Hall Sensor with Different Hall Plate Geometries in a 0.5µm CMOS Process
title_full_unstemmed Design and Evaluation of a Hall Sensor with Different Hall Plate Geometries in a 0.5µm CMOS Process
title_sort design and evaluation of a hall sensor with different hall plate geometries in a 0.5µm cmos process
publisher FIUBA
publishDate 2017
url https://elektron.fi.uba.ar/elektron/article/view/5
https://repositoriouba.sisbi.uba.ar/gsdl/cgi-bin/library.cgi?a=d&c=elektron&d=5_oai
work_keys_str_mv AT ronisnicolas designandevaluationofahallsensorwithdifferenthallplategeometriesina05μmcmosprocess
AT garciainzamariano designandevaluationofahallsensorwithdifferenthallplategeometriesina05μmcmosprocess
AT ronisnicolas disenoyevaluaciondeunsensorhallcondiferentesgeometriasdeplacashallenunprocesocmosde05mm
AT garciainzamariano disenoyevaluaciondeunsensorhallcondiferentesgeometriasdeplacashallenunprocesocmosde05mm
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