Pattern preserving deposition: Experimental results and modeling

In this work we discuss pattern-preserving growth during metal deposition from the vapor on micro/nano-structured metal substrates. Experimental results for Cu deposition on patterned Cu substrates show pattern preserving growth or pattern destruction depending on the incident angle. We introduce a...

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Detalles Bibliográficos
Autores principales:	Castez, Marcos Federico, Fonticelli, Mariano Hernán, Azzaroni, Omar, Salvarezza, Roberto Carlos, Solari, Hernán G.
Formato:	Articulo
Lenguaje:	Inglés
Publicado:	2005
Materias:	Ciencias Exactas Física pattern-preserving growth metal deposition
Acceso en línea:	http://sedici.unlp.edu.ar/handle/10915/159817
Aporte de:	SEDICI (UNLP) de Universidad Nacional de La Plata

id	I19-R120-10915-159817
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spelling	I19-R120-10915-1598172023-11-06T20:07:19Z http://sedici.unlp.edu.ar/handle/10915/159817 Pattern preserving deposition: Experimental results and modeling Castez, Marcos Federico Fonticelli, Mariano Hernán Azzaroni, Omar Salvarezza, Roberto Carlos Solari, Hernán G. 2005-09 2023-11-06T15:17:57Z en Ciencias Exactas Física pattern-preserving growth metal deposition In this work we discuss pattern-preserving growth during metal deposition from the vapor on micro/nano-structured metal substrates. Experimental results for Cu deposition on patterned Cu substrates show pattern preserving growth or pattern destruction depending on the incident angle. We introduce a mesoscopic 1+1 dimensional model including deposition flow (directed and isotropic), surface diffusion and shadowing effects that account for the experimental growth data. Moreover, simulations on post-deposition annealing, for high aspect-ratio patterns show departures from the predictions of the linear theory for surface diffusion. Instituto de Investigaciones Fisicoquímicas Teóricas y Aplicadas Articulo Articulo http://creativecommons.org/licenses/by/4.0/ Creative Commons Attribution 4.0 International (CC BY 4.0) application/pdf
institution	Universidad Nacional de La Plata
institution_str	I-19
repository_str	R-120
collection	SEDICI (UNLP)
language	Inglés
topic	Ciencias Exactas Física pattern-preserving growth metal deposition
spellingShingle	Ciencias Exactas Física pattern-preserving growth metal deposition Castez, Marcos Federico Fonticelli, Mariano Hernán Azzaroni, Omar Salvarezza, Roberto Carlos Solari, Hernán G. Pattern preserving deposition: Experimental results and modeling
topic_facet	Ciencias Exactas Física pattern-preserving growth metal deposition
description	In this work we discuss pattern-preserving growth during metal deposition from the vapor on micro/nano-structured metal substrates. Experimental results for Cu deposition on patterned Cu substrates show pattern preserving growth or pattern destruction depending on the incident angle. We introduce a mesoscopic 1+1 dimensional model including deposition flow (directed and isotropic), surface diffusion and shadowing effects that account for the experimental growth data. Moreover, simulations on post-deposition annealing, for high aspect-ratio patterns show departures from the predictions of the linear theory for surface diffusion.
format	Articulo Articulo
author	Castez, Marcos Federico Fonticelli, Mariano Hernán Azzaroni, Omar Salvarezza, Roberto Carlos Solari, Hernán G.
author_facet	Castez, Marcos Federico Fonticelli, Mariano Hernán Azzaroni, Omar Salvarezza, Roberto Carlos Solari, Hernán G.
author_sort	Castez, Marcos Federico
title	Pattern preserving deposition: Experimental results and modeling
title_short	Pattern preserving deposition: Experimental results and modeling
title_full	Pattern preserving deposition: Experimental results and modeling
title_fullStr	Pattern preserving deposition: Experimental results and modeling
title_full_unstemmed	Pattern preserving deposition: Experimental results and modeling
title_sort	pattern preserving deposition: experimental results and modeling
publishDate	2005
url	http://sedici.unlp.edu.ar/handle/10915/159817
work_keys_str_mv	AT castezmarcosfederico patternpreservingdepositionexperimentalresultsandmodeling AT fonticellimarianohernan patternpreservingdepositionexperimentalresultsandmodeling AT azzaroniomar patternpreservingdepositionexperimentalresultsandmodeling AT salvarezzarobertocarlos patternpreservingdepositionexperimentalresultsandmodeling AT solarihernang patternpreservingdepositionexperimentalresultsandmodeling
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Pattern preserving deposition: Experimental results and modeling

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