Experimental determination of multiple ionization cross sections in Si by electron impact
The thin sample method is often used to experimentally determine ionization cross sections, specially when focusing on the low overvoltage region. The simplicity of the formalism involved in this method is very appealing, but some experimental complications arise in the preparation of thin films. In...
Guardado en:
| Autores principales: | Pérez, Pablo Daniel, Sepúlveda, Andrés, Castellano, Gustavo, Trincavelli, Jorge |
|---|---|
| Formato: | article |
| Lenguaje: | Inglés |
| Publicado: |
2022
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| Materias: | |
| Acceso en línea: | http://hdl.handle.net/11086/23708 |
| Aporte de: |
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