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| LEADER |
00871cam a22002894a 4500 |
| 001 |
15423099 |
| 003 |
armpuni |
| 005 |
20240321124522.0 |
| 008 |
080822s2008 gw a b 001 0 eng c |
| 010 |
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|a 2008459617
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| 020 |
|
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|a 9783527314942
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| 035 |
|
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|a (OCoLC)ocn188552319
|
| 040 |
|
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|c armpuni
|
| 042 |
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|a pcc
|
| 082 |
0 |
0 |
|a 621
|2 22
|
| 245 |
0 |
0 |
|a Reliability of MEMS /
|c edited by Osamu Tabata and Toshiyuki Tsuchiya.
|
| 260 |
|
|
|a Weinheim :
|b Wiley-VCH,
|c c2008.
|
| 300 |
|
|
|a xx, 303 p. :
|b ill. ;
|c 25 cm.
|
| 440 |
|
0 |
|a Advanced micro & nanosystems ;
|v v.6
|
| 500 |
|
|
|a "Testing of materials and devices"--Cover.
|
| 504 |
|
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|a Includes bibliographical references and index.
|
| 650 |
|
0 |
|a SISTEMAS MICROELECTROMECÁNICOS
|x FIABILIDAD
|
| 650 |
|
0 |
|a MEMS
|
| 700 |
1 |
|
|a Tsuchiya, Toshiyuki.
|
| 700 |
1 |
|
|a Tabata, Osamu,
|d 1956-
|
| 942 |
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|2 cdu
|c LB
|
| 999 |
|
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|c 7726
|d 8901
|