Anatase TiO2 films obtained by cathodic arc deposition
TiO2 thin films were prepared on glass substrates at different temperatures employing an unfiltered cathodic arc device. The temperature values were varied from room temperature to 400 °C. The crystalline structure of the films was determined by X-ray diffraction. The surface morphology was studied...
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| Formato: | Capítulo de libro |
| Lenguaje: | Inglés |
| Publicado: |
2007
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| Acceso en línea: | Registro en Scopus DOI Handle Registro en la Biblioteca Digital |
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| LEADER | 06934caa a22009257a 4500 | ||
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| 001 | PAPER-6724 | ||
| 003 | AR-BaUEN | ||
| 005 | 20250624110745.0 | ||
| 008 | 190411s2007 xx ||||fo|||| 00| 0 eng|d | ||
| 024 | 7 | |2 scopus |a 2-s2.0-33847163702 | |
| 040 | |a Scopus |b spa |c AR-BaUEN |d AR-BaUEN | ||
| 100 | 1 | |a Kleiman, Ariel Javier | |
| 245 | 1 | 0 | |a Anatase TiO2 films obtained by cathodic arc deposition |
| 260 | |c 2007 | ||
| 270 | 1 | 0 | |m Márquez, A.; Instituto de Física del Plasma (CONICET), Dpto. de Física, Fac. de Ciencias Exactas y Naturales, Cdad. Universitaria Pab. 1, C1428EHA Buenos Aires, Argentina; email: adriana@tinfip.lfp.uba.ar |
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| 506 | |2 openaire |e Política editorial | ||
| 520 | 3 | |a TiO2 thin films were prepared on glass substrates at different temperatures employing an unfiltered cathodic arc device. The temperature values were varied from room temperature to 400 °C. The crystalline structure of the films was determined by X-ray diffraction. The surface morphology was studied by scanning electron microscopy and atomic force microscopy. Transmittance in UV-visible region was also measured. All films deposited at temperatures lower than 300 °C were amorphous, whereas films obtained at higher temperatures grew in crystalline anatase phase. Phase transition amorphous-to-anatase was observed after post-annealing at 400 °C. The average transmittance value for all films was higher than 80%, a comparison among the films obtained at different temperatures showed a transmittance value slightly higher for films obtained at highest temperatures. Grain size for as-deposited crystalline films was determined approximately in 20 nm, with a surface roughness of about 2 nm. © 2006 Elsevier B.V. All rights reserved. |l eng | |
| 536 | |a Detalles de la financiación: Universidad de Buenos Aires | ||
| 536 | |a Detalles de la financiación: Consejo Nacional de Investigaciones Científicas y Técnicas | ||
| 536 | |a Detalles de la financiación: The authors would like to thank Martín Mirenda and Enrique San Román for their collaboration in the optical measurements. This work was supported by grants from Buenos Aires University and CONICET. | ||
| 593 | |a Instituto de Física del Plasma (CONICET), Dpto. de Física, Fac. de Ciencias Exactas y Naturales, Cdad. Universitaria Pab. 1, C1428EHA Buenos Aires, Argentina | ||
| 593 | |a Centro de Investigaciones en Sólidos, CITEFA- CONICET, J.B. de La Salle 4397, B1603ALO Villa Martelli Provincia BA, Argentina | ||
| 690 | 1 | 0 | |a ARC EVAPORATION |
| 690 | 1 | 0 | |a ATOMIC FORCE MICROSCOPY (AFM) |
| 690 | 1 | 0 | |a STRUCTURE |
| 690 | 1 | 0 | |a TITANIUM OXIDE |
| 690 | 1 | 0 | |a DEPOSITION |
| 690 | 1 | 0 | |a GRAIN SIZE AND SHAPE |
| 690 | 1 | 0 | |a PHASE TRANSITIONS |
| 690 | 1 | 0 | |a SURFACE MORPHOLOGY |
| 690 | 1 | 0 | |a SURFACE ROUGHNESS |
| 690 | 1 | 0 | |a THERMAL EFFECTS |
| 690 | 1 | 0 | |a THIN FILMS |
| 690 | 1 | 0 | |a ARC EVAPORATION |
| 690 | 1 | 0 | |a CATHODIC ARC DEPOSITION |
| 690 | 1 | 0 | |a CRYSTALLINE STRUCTURE |
| 690 | 1 | 0 | |a TITANIUM DIOXIDE |
| 690 | 1 | 0 | |a DEPOSITION |
| 690 | 1 | 0 | |a GRAIN SIZE AND SHAPE |
| 690 | 1 | 0 | |a PHASE TRANSITIONS |
| 690 | 1 | 0 | |a SURFACE MORPHOLOGY |
| 690 | 1 | 0 | |a SURFACE ROUGHNESS |
| 690 | 1 | 0 | |a THERMAL EFFECTS |
| 690 | 1 | 0 | |a THIN FILMS |
| 690 | 1 | 0 | |a TITANIUM DIOXIDE |
| 700 | 1 | |a Márquez, Adriana Beatriz | |
| 700 | 1 | |a Lamas, Diego Germán | |
| 773 | 0 | |d 2007 |g v. 201 |h pp. 6358-6362 |k n. 14 |p Surf. Coat. Technol. |x 02578972 |w (AR-BaUEN)CENRE-6945 |t Surface and Coatings Technology | |
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| 856 | 4 | 0 | |u https://doi.org/10.1016/j.surfcoat.2006.12.002 |y DOI |
| 856 | 4 | 0 | |u https://hdl.handle.net/20.500.12110/paper_02578972_v201_n14_p6358_Kleiman |y Handle |
| 856 | 4 | 0 | |u https://bibliotecadigital.exactas.uba.ar/collection/paper/document/paper_02578972_v201_n14_p6358_Kleiman |y Registro en la Biblioteca Digital |
| 961 | |a paper_02578972_v201_n14_p6358_Kleiman |b paper |c PE | ||
| 962 | |a info:eu-repo/semantics/article |a info:ar-repo/semantics/artículo |b info:eu-repo/semantics/publishedVersion | ||
| 999 | |c 67677 | ||