X-ray reflectivity analysis of titanium dioxide thin films grown by cathodic arc deposition

TiO 2 thin films deposited by a vacuum arc on a glass substrate were characterized by X-ray reflectivity (XRR), X-ray diffraction (XRD), scanning electron microscopy (SEM) and atomic force microscopy (AFM). Several thin films with different amounts of deposited TiO 2 mass and different deposition an...

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Autor principal: Kleiman, Ariel Javier
Otros Autores: Lamas, Diego Germán, Craievich, A.F, Márquez, Adriana Beatriz
Formato: Capítulo de libro
Lenguaje:Inglés
Publicado: American Scientific Publishers 2014
Acceso en línea:Registro en Scopus
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100 1 |a Kleiman, Ariel Javier 
245 1 0 |a X-ray reflectivity analysis of titanium dioxide thin films grown by cathodic arc deposition 
260 |b American Scientific Publishers  |c 2014 
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504 |a Kleiman, A., Márquez, A., Boxman, R.L., (2008) Plasma Sources Sci. Technol., 17, p. 015008 
504 |a Kleiman, A., Márquez, A., Lamas, D.G., (2007) Surf. Coat. Technol., 201, p. 6358 
504 |a Márquez, A., Blanco, G., De Rapp, M.E.F., Lamas, D.G., Tarulla, R., (2004) Surf. Coat. Technol., 187, p. 154 
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504 |a Daillant, J., Gibaud, A., (1999) X-Ray and Neutron Reflectivity: Principles and Applications, , Springer, Berlin 
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506 |2 openaire  |e Política editorial 
520 3 |a TiO 2 thin films deposited by a vacuum arc on a glass substrate were characterized by X-ray reflectivity (XRR), X-ray diffraction (XRD), scanning electron microscopy (SEM) and atomic force microscopy (AFM). Several thin films with different amounts of deposited TiO 2 mass and different deposition and annealing temperatures were studied. A qualitative analysis of the XRD patterns indicated the presence of the anatase and/or rutile crystalline phases in most of the studied samples. From the analysis of the experimental XRR curves - which exhibited a wide angular range of oscillatory behavior - the thickness, mass density and interface roughness were determined. All XRR patterns were well fitted by modeled curves that assume the presence of a single and homogeneous TiO 2 layer over which a very thin H 2 O layer is adsorbed. The thickest H 2 O adsorption layers were developed in films with the highest anatase content. Our overall results of the XRR analyses are consistent with those derived from the imaging techniques (SEM and AFM). Copyright © 2014 American Scientific Publishers.  |l eng 
536 |a Detalles de la financiación: Consejo Nacional de Investigaciones Científicas y Técnicas, CONICET, PIP 11220090100219 
593 |a Consejo Nacional de Investigaciones Científicas y Técnicas (CONICET), Av. Rivadavia 1917, C1033AAJ Buenos Aires, Argentina 
593 |a Instituto de Física Del Plasma (INFIP), Departamento de Física, Universidad de Buenos Aires, Ciudad Universitaria, Pabellón I, C1428EHA Buenos Aires, Argentina 
593 |a Facultad de Ingeniería, Laboratorio de Caracterización de Materiales, Universidad Nacional Del Comahue, Buenos Aires 1400, Q8300IBX Neuquén, Argentina 
593 |a Instituto de Física, Universidade de São Paulo, Cidade Universitaria, Travessa R da Rua do Matao, No. 187, 05508-900 São Paulo, Brazil 
690 1 0 |a CATHODIC ARC DEPOSITION 
690 1 0 |a THIN FILMS 
690 1 0 |a X-RAY REFLECTIVITY 
690 1 0 |a ATOMIC FORCE MICROSCOPY 
690 1 0 |a IMAGING TECHNIQUES 
690 1 0 |a OXIDE MINERALS 
690 1 0 |a SCANNING ELECTRON MICROSCOPY 
690 1 0 |a SUBSTRATES 
690 1 0 |a THIN FILMS 
690 1 0 |a TITANIUM DIOXIDE 
690 1 0 |a VACUUM APPLICATIONS 
690 1 0 |a X RAY DIFFRACTION 
690 1 0 |a ANNEALING TEMPERATURES 
690 1 0 |a CATHODIC ARC DEPOSITION 
690 1 0 |a OSCILLATORY BEHAVIORS 
690 1 0 |a QUALITATIVE ANALYSIS 
690 1 0 |a TIO 
690 1 0 |a TITANIUM DIOXIDE THIN FILM 
690 1 0 |a X RAY REFLECTIVITY 
690 1 0 |a X-RAY REFLECTIVITY ANALYSIS 
690 1 0 |a DEPOSITION 
700 1 |a Lamas, Diego Germán 
700 1 |a Craievich, A.F. 
700 1 |a Márquez, Adriana Beatriz 
773 0 |d American Scientific Publishers, 2014  |g v. 14  |h pp. 3902-3909  |k n. 5  |p J. Nanosci. Nanotechnol.  |x 15334880  |t Journal of Nanoscience and Nanotechnology 
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