Interferometric lithography with sub-100-nm resolution using a tabletop 46.9-nm laser
Combining a compact table top soft X ray laser with an interferometric lithography set up arrays of nanodots and nanoholes were directly patterned on the surface of different photoresists. Multiple exposures with a Lloyd's mirror interferometer printed arrays of holes and dots over an area of 0...
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| Otros Autores: | , , , , |
| Formato: | Acta de conferencia Capítulo de libro |
| Lenguaje: | Inglés |
| Publicado: |
2007
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| Acceso en línea: | Registro en Scopus DOI Handle Registro en la Biblioteca Digital |
| Aporte de: | Registro referencial: Solicitar el recurso aquí |
| LEADER | 06125caa a22007337a 4500 | ||
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| 001 | PAPER-22548 | ||
| 003 | AR-BaUEN | ||
| 005 | 20241128101620.0 | ||
| 008 | 190411s2007 xx ||||fo|||| 10| 0 eng|d | ||
| 024 | 7 | |2 scopus |a 2-s2.0-42149161333 | |
| 030 | |a PSISD | ||
| 040 | |a Scopus |b spa |c AR-BaUEN |d AR-BaUEN | ||
| 100 | 1 | |a Wachulak, P.W. | |
| 245 | 1 | 0 | |a Interferometric lithography with sub-100-nm resolution using a tabletop 46.9-nm laser |
| 260 | |c 2007 | ||
| 270 | 1 | 0 | |m Wachulak, P. W.; NSF ERC for Extreme Ultraviolet Science and Technology, Department of Electrical and Computer Engineering, Colorado State UniversityUnited States |
| 504 | |a Aizpurua, J., Optical properties of gold nanorings (2003) Physical Review Letters, 90 (5) | ||
| 504 | |a Castano, F.J., Spin-dependent scattering in multilayered magnetic rings (2005) Physical Review Letters, 95 (13) | ||
| 504 | |a Castano, F.J., Magnetic configurations in 160-520-nm-diameter ferromagnetic rings (2004) Physical Review B, 69 (14) | ||
| 504 | |a Chen, Y., Nanoimprint fabrication of micro-rings for magnetization reversal studies (2001) Microelectronic Engineering, 57 -8, pp. 405-410 | ||
| 504 | |a Lebib, A., Size and thickness dependencies of magnetization reversal in Co dot arrays (2001) Journal Of Applied Physics, 89 (7), pp. 3892-3896 | ||
| 504 | |a Mancoff, F.B., Phase-locking in double-point-contact spin-transfer devices (2005) Nature, 437 (7057), pp. 393-395 | ||
| 504 | |a Saitoh, E., Critical phenomena in chiral symmetry breakdown of micromagnetic configurations in a nanostructuredferromagnetic ring (2005) Physical Review B, 71 (17) | ||
| 504 | |a Geissler, M., Xia, Y.N., Patterning: Principles and some new developments (2004) Advanced Materials, 16 (15), pp. 1249-1269 | ||
| 504 | |a Xia, Y.N., Unconventional methods for fabricating and patterning nano structures (1999) Chemical Reviews, 99 (7), pp. 1823-1848 | ||
| 504 | |a Fan, W.J., Large-area, infrared nanophotonic materials fabricated using interferometric lithography (2005) Journal Of Vacuum Science & Technology B, 23 (6), pp. 2700-2704 | ||
| 504 | |a Fernandez, A., Methods for fabricating arrays of holes using interference lithography (1997) Journal Of Vacuum Science & Technology B, 15 (6), pp. 2439-2443 | ||
| 504 | |a Solak, H.H., David, C., Patterning of circular structure arrays with interference lithography (2003) Journal Of Vacuum Science & Technology B, 21 (6), pp. 2883-2887 | ||
| 504 | |a Solak, H.H., Multiple-beam interference lithography with electron beam written gratings (2002) Journal Of Vacuum Science & Technology B, 20 (6), pp. 2844-2848 | ||
| 504 | |a Solak, H.H., Exposure of 38 nm period grating patterns with extreme ultraviolet interferometric lithography (1999) Applied Physics Letters, 75 (15), pp. 2328-2330 | ||
| 504 | |a Switkes, M., Rothschild, M., Immersion lithography at 157 nm (2001) Journal Of Vacuum Science & Technology B, 19 (6), pp. 2353-2356 | ||
| 504 | |a Benware, B.R., Operation and output pulse characteristics of an extremely compact capillary-discharge tabletop soft-x-ray laser (1997) Optics Letters, 22 (11), pp. 796-798 | ||
| 504 | |a Liu, Y., Achievement of essentially full spatial coherence in a high-average-power soft-x-ray laser (2001) Physical Review A, 6303 (3) | ||
| 504 | |a Liu, Y.W., Spatial coherence measurement of a high average power table-top soft X-ray laser (2001) Journal De Physique Iv, 11 (PR2), pp. 123-126 | ||
| 504 | |a Macchietto, C.D., Benware, B.R., Rocca, J.J., Generation of millijoule-level soft-x-ray laser pulses at a 4-Hz repetition rate in a highly saturated tabletop capillary discharge amplifier (1999) Optics Letters, 24 (16), pp. 1115-1117A4 - The International Society for Optical Engineering (SPIE) | ||
| 506 | |2 openaire |e Política editorial | ||
| 520 | 3 | |a Combining a compact table top soft X ray laser with an interferometric lithography set up arrays of nanodots and nanoholes were directly patterned on the surface of different photoresists. Multiple exposures with a Lloyd's mirror interferometer printed arrays of holes and dots over an area of 0.5× 0.5 mm2 with typical diameters down to 60 nm full width at half maximum. This laser-based soft X-ray interferometric tool demonstrated the possibility to print different nanoscale patterns using a compact table-top set up. |l eng | |
| 593 | |a NSF ERC for Extreme Ultraviolet Science and Technology, Department of Electrical and Computer Engineering, Colorado State University, United States | ||
| 593 | |a Departamento de Física, Facultad de Ciencias Exactas, Universidad de Buenos Aires, Argentina | ||
| 690 | 1 | 0 | |a INTERFEROMETRIC LITHOGRAPHY |
| 690 | 1 | 0 | |a NANOPATTERNING |
| 690 | 1 | 0 | |a SOFT X-RAY LASERS |
| 690 | 1 | 0 | |a INTERFEROMETRY |
| 690 | 1 | 0 | |a MIRRORS |
| 690 | 1 | 0 | |a PHOTORESISTS |
| 690 | 1 | 0 | |a X RAY LASERS |
| 690 | 1 | 0 | |a INTERFEROMETRIC LITHOGRAPHY |
| 690 | 1 | 0 | |a NANODOTS |
| 690 | 1 | 0 | |a NANOHOLES |
| 690 | 1 | 0 | |a LITHOGRAPHY |
| 700 | 1 | |a Patel, D. | |
| 700 | 1 | |a Capeluto, María Gabriela | |
| 700 | 1 | |a Menoni, C.S. | |
| 700 | 1 | |a Rocca, J.J. | |
| 700 | 1 | |a Marconi, M.C. | |
| 711 | 2 | |c San Diego, CA |d 29 August 2007 through 30 August 2007 |g Código de la conferencia: 71792 | |
| 773 | 0 | |d 2007 |g v. 6702 |p Proc SPIE Int Soc Opt Eng |n Proceedings of SPIE - The International Society for Optical Engineering |x 0277786X |z 9780819468505 |t Soft X-Ray Lasers and Applications VII | |
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