Ion emission in a dc titanium cathodic arc operated with oxygen
The ion emission and its correlation with the deposition rate in a dc titanium cathodic arc run in an oxygen ambient with a current of 115 A has been investigated. The incoming O 2 flow was varied between 10-60 sccm, resulting in a working pressure of 0.1-10 Pa. The ion saturation current measuremen...
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| Formato: | Acta de conferencia Capítulo de libro |
| Lenguaje: | Inglés |
| Publicado: |
2008
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| Acceso en línea: | Registro en Scopus DOI Handle Registro en la Biblioteca Digital |
| Aporte de: | Registro referencial: Solicitar el recurso aquí |
| LEADER | 03881caa a22006137a 4500 | ||
|---|---|---|---|
| 001 | PAPER-22235 | ||
| 003 | AR-BaUEN | ||
| 005 | 20250624110554.0 | ||
| 008 | 190411s2008 xx ||||fo|||| 10| 0 eng|d | ||
| 024 | 7 | |2 scopus |a 2-s2.0-70350639698 | |
| 030 | |a PHSTE | ||
| 040 | |a Scopus |b spa |c AR-BaUEN |d AR-BaUEN | ||
| 100 | 1 | |a Kleiman, Ariel Javier | |
| 245 | 1 | 0 | |a Ion emission in a dc titanium cathodic arc operated with oxygen |
| 260 | |c 2008 | ||
| 270 | 1 | 0 | |m Kleiman, A.; Instituto de Física del Plasma - CONICET - Departamento de Física, Universidad de Buenos Aires, Ciudad Universitaria, (1428) Buenos Aires, Argentina; email: kleiman@tinfip.lfp.uba.ar |
| 504 | |a Diebold, U., (2003) Surf. Sci. Rep, 48, p. 53 | ||
| 504 | |a Boxman R L, Sanders D M and Martin P J (eds) 1995 Handbook of Vacuum Arc Science and Technology: Fundamentals and Applications (Park Ridge, NJ: I Noyes Publication); Kleiman, A., Márquez, A., Lamas, D.G., (2007) Surf. Coat. Technol, 201, p. 6358 | ||
| 504 | |a Brown, I.G., Godechot, X., (1991) IEEE Trans. Plasma Sci, 19, p. 713 | ||
| 504 | |a Grondona, D., Márquez, A., Minotti, F., Kelly, H., (2004) J. Appl. Phys, 96, p. 3077 | ||
| 504 | |a Boxman, R.L., Goldsmith, S., (1990) Surf. Coat. Technol, 43-44, p. 1024 | ||
| 506 | |2 openaire |e Política editorial | ||
| 520 | 3 | |a The ion emission and its correlation with the deposition rate in a dc titanium cathodic arc run in an oxygen ambient with a current of 115 A has been investigated. The incoming O 2 flow was varied between 10-60 sccm, resulting in a working pressure of 0.1-10 Pa. The ion saturation current measurements were carried out with Langmuir probes located on the system axis at two distances, 20 and 30 cm, from the cathode. The deposition rates were determined by weighting the deposited mass on glass substrates located at the same positions as the probes. The ion density and ion energy were estimated for the different operation parameters. The sticking coefficient for titanium was estimated by using the deposition rate and the ion saturation current. © 2008 The Royal Swedish Academy of Sciences. |l eng | |
| 593 | |a Instituto de Física del Plasma - CONICET - Departamento de Física, Universidad de Buenos Aires, Ciudad Universitaria, (1428) Buenos Aires, Argentina | ||
| 593 | |a CONICET, Argentina | ||
| 690 | 1 | 0 | |a CATHODIC ARC |
| 690 | 1 | 0 | |a GLASS SUBSTRATES |
| 690 | 1 | 0 | |a ION DENSITY |
| 690 | 1 | 0 | |a ION EMISSIONS |
| 690 | 1 | 0 | |a ION ENERGIES |
| 690 | 1 | 0 | |a ION SATURATION CURRENT |
| 690 | 1 | 0 | |a OPERATION PARAMETERS |
| 690 | 1 | 0 | |a OXYGEN AMBIENT |
| 690 | 1 | 0 | |a STICKING COEFFICIENTS |
| 690 | 1 | 0 | |a WORKING PRESSURES |
| 690 | 1 | 0 | |a CAVITY RESONATORS |
| 690 | 1 | 0 | |a DEPOSITION RATES |
| 690 | 1 | 0 | |a ELECTRIC CURRENT MEASUREMENT |
| 690 | 1 | 0 | |a LEAKAGE (FLUID) |
| 690 | 1 | 0 | |a OXYGEN |
| 690 | 1 | 0 | |a PROBES |
| 690 | 1 | 0 | |a TITANIUM |
| 690 | 1 | 0 | |a IONS |
| 700 | 1 | |a Márquez, Adriana Beatriz | |
| 700 | 1 | |a Kelly, H. | |
| 711 | 2 | |c Caracas |d 17 September 2007 through 21 September 2007 |g Código de la conferencia: 78221 | |
| 773 | 0 | |d 2008 |g v. T131 |p Phys Scr T |n Physica Scripta T |x 02811847 |t 12th Latin American Workshop on Plasma Physics | |
| 856 | 4 | 1 | |u https://www.scopus.com/inward/record.uri?eid=2-s2.0-70350639698&doi=10.1088%2f0031-8949%2f2008%2fT131%2f014005&partnerID=40&md5=73aeb47d94875639622c6511bac3bade |y Registro en Scopus |
| 856 | 4 | 0 | |u https://doi.org/10.1088/0031-8949/2008/T131/014005 |y DOI |
| 856 | 4 | 0 | |u https://hdl.handle.net/20.500.12110/paper_02811847_vT131_n_p_Kleiman |y Handle |
| 856 | 4 | 0 | |u https://bibliotecadigital.exactas.uba.ar/collection/paper/document/paper_02811847_vT131_n_p_Kleiman |y Registro en la Biblioteca Digital |
| 961 | |a paper_02811847_vT131_n_p_Kleiman |b paper |c PE | ||
| 962 | |a info:eu-repo/semantics/conferenceObject |a info:ar-repo/semantics/documento de conferencia |b info:eu-repo/semantics/publishedVersion | ||
| 999 | |c 83188 | ||