Experimental investigation of ion parameters in a cathodic arc plasma operated with nitrogen gas

The ion kinetic energy and ion density was determined for the plasma generated in the outer region of the arc channel in a pulsed low-pressure cathodic arc. The device was operated with N2 gas and with a Ti cathode within the pressure range 102 4- 150 Pa, with a peak current of 520 A. A retarding fi...

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Autor principal: Grondona, Diana Elena
Otros Autores: Kelly, Héctor Juan, Márquez, Adriana Beatriz, Minotti, Fernando Oscar, Zebrowski, J.
Formato: Capítulo de libro
Lenguaje:Inglés
Publicado: 2000
Acceso en línea:Registro en Scopus
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100 1 |a Grondona, Diana Elena 
245 1 0 |a Experimental investigation of ion parameters in a cathodic arc plasma operated with nitrogen gas 
260 |c 2000 
504 |a Boxman, R.L., Sanders, D.M., Martin, Handbook of Vacuum Ar Science and Technology, Fundamentals and Applications. Park Ridge NJ: Noyes, 1995. 
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504 |a Kimbling, C.W., "Erosion and Ionization in the Cathode Spot Regions O Vacuum Arcs," J. Appl. Phys., , vol. 44, pp. 3074-3081, 1973 
504 |a Kutzner, J., Miller, H.C., "Ion Flux from the Cathode Region of Vacuum Arc," IEEE Trans. Plasma Sci., , vol. 17, pp. 688-694, 1989 
504 |a Randhawa, H., "Cathodic Arc Plasma Deposition Technology," Thin Soli Films, , vol. 167, pp. 175-185, 1988 
504 |a Kimbling, C.W., "Cathode Spot Erosion and Ionization Phenomena in Th Transition from Vacuum to Atmospheric Pressure Arcs," J. Appl. Phys., , vol. 45, pp. 5235-5244, 1974 
504 |a Meunier, J.L., De Acevedo, M.D., "Carbon Cathode Spot Plasm Flux Distributions in Low Pressures of Hydrogen: Some Evidence for Th C+ + H2 -CH+ + H Reaction," IEEE Trans. Plasma Sci., , vol. 20, pp 1053-1059, 1992 
504 |a Grondona, D., Kelly, H., Marquez, A., "Ion-gas Interaction in Vacuum Arc at Intermediate Pressures," Astrophys. Space Sci., , vol. 286 pp. 511-515, 1998 
504 |a Boxman, R.L., Goldsmith, S., Shalev, S., Yaloz, H., Brosh, N., "Fas Deposition of Metallurgical Coatings and Production of Surface Alloy Using a Pulsed High Current Vacuum Arc," Thin Solid Films, , vol. 139 pp. 41-52, 1986 
504 |a Bruzzone, H., Kelly, H., Marquez, A., Lamas, D., Ansaldi, A., Oviedo, C., "TIN Coatings Generated with a Pulsed Plasma Arc," Plasm Sources Sci. Technol., , vol. 5, pp. 582-587, 1996 
504 |a Meunier, J.L., "Pressure Limits for the Vacuum Arc Deposition Technique, IEEE Trans. Plasma Sci., , vol. 18, pp. 904-910, 1990 
504 |a Meunier, J.L., Drouet, M.G., "Experimental Study of the Effect O Gas Pressure on Arc Cathode Erosion and Redeposition in He, Ar and SF6 from Vacuum to Atmospheric Pressure," IEEE Trans. Plasma Sci., , vol 15, pp. 515-519, 1987 
504 |a Boxman, R.L., Goldsmith, S., "Momentum Interchange Betwee Cathode-spot Plasma Jets and Background Gases and Vapors and It Implications on Vacuum-arc Anode-spot Development," IEEE Trans Plasma Sci., , vol. 18, pp. 231-236, 1990 
504 |a Kelly, H., Marquez, A., Minotti, F., "A Simplified Fluid Model O the Metallic Plasma and Neutral Gas Interaction in a Multicathode Spo Vacuum Arc," IEEE Trans. Plasma Sci., , vol. 26, pp. 1322-1329, 1998 
504 |a Kelly, H., Marquez, A., Minotti, F., Fontan, C.F., "The Plasma State I the Surroundings of a Multi-cathode-spot Vacuum Arc," J. Phys. D: Appl Phys., , vol. 31, pp. 1737-1741, 1998 
504 |a Bruzzone, H., Kelly, H., Marquez, A., Lamas, D., Ansaldi, A., Oviedo, C., "TIN Coatings Generated with a Pulsed Plasma Arc," Plasm Sources Sci. Technol., , vol. 5, pp. 582-587, 1996 
504 |a Rusteberg, C., Lindmayer, M., Juttner, B., Pursch, H., "On the Io Energy Distribution of High Current Arcs in Vacuum," IEEE Trans. Plasm Sci., , vol. 23, pp. 909-914, 1995 
504 |a Sakaki, M., Sakakibara, T., "Pressure Dependence of Plasma Parameters in Medium-vacuum Nitrogen Arc Discharge with the Titaniu Cathode," IEEE Trans. Plasma Sci., , vol. 19, pp. 25-28, 1991 
504 |a Kutzner, J., Miller, H.C., "Integrated Ion Flux Emitted from Th Cathode Spot Region of a Diffuse Vacuum Arc," J. Phys. D: Appl. Phys., , vol. 25, pp. 686-693, 1992 
504 |a Shkolnik, S.M., "Electrostatic Probe Measurements in a Vacuum Arc, IEEE Trans. Plasma Sci., , vol. 13, pp. 336-338, 1985 
504 |a Grondona, D., Kelly, H., Marquez, A., Minotti, F., "Electrostatic Prob Measurements in the Outer Region of a Low Pressure Arc," J. Phys. D Appl. Phys., , vol. 31, pp. 3358-3366, 1998 
504 |a Lam, S.H., "Unified Theory for the Langmuir Probe in a Collisionles Plasma," Phys. Fluids, , vol. 8, pp. 73-87, 1965 
504 |a Goldsmith, S., "The Interelectrode Plasma," in Handbook of Vacuum Ar Science and Technology, R. L. Boxman, P. J. Martin, and D. M. Sanders Eds. NJ: Noyes Publications, , 1995, pp. 283-284 
506 |2 openaire  |e Política editorial 
520 3 |a The ion kinetic energy and ion density was determined for the plasma generated in the outer region of the arc channel in a pulsed low-pressure cathodic arc. The device was operated with N2 gas and with a Ti cathode within the pressure range 102 4- 150 Pa, with a peak current of 520 A. A retarding field analyzer, a spherical Langmuir probe, and a calorimetric system were employed. The resulting kinetic energy for both Ti+ and Ti++ ions was 40 ±3 eV at the cathode spots. The obtained values for the ion density are in agreement with those predicted by hydrodynamic models with spherical symmetry if the ion current penetrating into the outer region is taken as 10 % of the total discharge current. It was also found that the ion density increases (and the ion kinetic energy decreases) with the filling pressure, a fact that can be attributed to an ion slowing by elastic collisions with neutrals. This behavior cannot be explained with the presence of a shock wave separating a plasma region from an unperturbed neutral gas region. © 2000 IEEE.  |l eng 
536 |a Detalles de la financiación: Consejo Nacional de Investigaciones Científicas y Técnicas 
536 |a Detalles de la financiación: Universidad de Buenos Aires 
536 |a Detalles de la financiación: National Research Council of Science and Technology 
536 |a Detalles de la financiación: National Research Council of Science and Technology 
536 |a Detalles de la financiación: National Research Council of Science and Technology 
536 |a Detalles de la financiación: Manuscript received November 22, 1999; revised February 24, 2000. This work was supported by the Buenos Aires University and the Consejo Nacional de Investigaciones Científicas y Tecnológicas (CONICET). The authors are with the Instituto de Física del Plasma (CONICET), Departa-mento de Física, Facultad de Ciencias Exactas y Naturales (UBA), 1428 Buenos Aires, Argentina (e-mail: kelly@tinfip.lfp.uba.ar). Publisher Item Identifier S 0093-3813(00)07247-7. 
536 |a Detalles de la financiación: Dr. Kelly has been a member of the National Research Council of Science of Argentina since 1980. 
536 |a Detalles de la financiación: Dr. Márquez was a Fellow of the National Research Council of Science of Argentina. 
536 |a Detalles de la financiación: Dr. Minotti has been a member of the National Research Council of Science of Argentina since 1993. 
593 |a Institute de Física del Plasma (CONICET), Departamento de Física, Facultad de Ciencias Exactas y Naturales (UBA), 1428 Buenos Aires, Argentina 
690 1 0 |a HYDRODYNAMIC MODEL 
690 1 0 |a ION DIAGNOSTICS 
690 1 0 |a ION-GAS INTERACTION 
690 1 0 |a VACUUM ARC 
690 1 0 |a CALORIMETRY 
690 1 0 |a CATHODES 
690 1 0 |a COMPUTER SIMULATION 
690 1 0 |a ELECTRIC ARCS 
690 1 0 |a IONS 
690 1 0 |a KINETIC THEORY 
690 1 0 |a NITROGEN 
690 1 0 |a PLASMA DEVICES 
690 1 0 |a TITANIUM 
690 1 0 |a VACUUM 
690 1 0 |a CATHODIC ARC PLASMA 
690 1 0 |a HYDRODYNAMIC MODEL 
690 1 0 |a ION DIAGNOSTICS 
690 1 0 |a ION GAS INTERACTION 
690 1 0 |a VACUUM ARC 
690 1 0 |a PLASMAS 
700 1 |a Kelly, Héctor Juan 
700 1 |a Márquez, Adriana Beatriz 
700 1 |a Minotti, Fernando Oscar 
700 1 |a Zebrowski, J. 
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