Modeling growth from the vapor and thermal annealing on micro- and nanopatterned substrates

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We propose a (1+1) -dimensional mesoscopic model to describe the most relevant physical processes that take place while depositing and/or annealing micro- and nanopatterned solid substrates. The model assumes that a collimated incident beam impinges over the growing substrate; scattering effects in...

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Autor principal: Castez, M.F
Otros Autores: Salvarezza, R.C, Solari, H.G
Formato: Capítulo de libro
Lenguaje:Inglés
Publicado: 2006
Acceso en línea:Registro en Scopus
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Biblioteca Central Dr. Luis F. Leloir (FCEN) de Universidad de Buenos Aires
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100 1 |a Castez, M.F. 
245 1 0 |a Modeling growth from the vapor and thermal annealing on micro- and nanopatterned substrates 
260 |c 2006 
270 1 0 |m Castez, M.F.; Instituto de Investigaciones Fisicoquímicas Teóricas y Aplicadas (INIFTA), UNLP, CONICET, Casilla de Correo 16, Sucursal 4, (1900) La Plata, Argentina 
506 |2 openaire  |e Política editorial 
504 |a Family, F., (1986) J. Phys. A, 19, p. 441. , JPHAC5 0305-4470 10.1088/0305-4470/19/8/006 
504 |a Wolf, D.E., Villain, J., (1990) Europhys. Lett., 13, p. 389. , EULEEJ 0295-5075 
504 |a Kardar, M., Parisi, G., Zhang, Y.C., (1986) Phys. Rev. Lett., 56, p. 889. , PRLTAO 0031-9007 10.1103/PhysRevLett.56.889 
504 |a Sun, T., Guo, H., Grant, M., (1989) Phys. Rev. A, 40, p. 6763. , PLRAAN 1050-2947 10.1103/PhysRevA.40.6763 
504 |a Lai, Z.W., Das Sarma, S., (1991) Phys. Rev. Lett., 66, p. 2348. , PRLTAO 0031-9007 10.1103/PhysRevLett.66.2348 
504 |a Johnson, M.D., Orme, C., Hunt, A.W., Graff, D., Sudijono, J., Sander, L.M., Orr, B.G., (1994) Phys. Rev. Lett., 72, p. 116. , PRLTAO 0031-9007 10.1103/PhysRevLett.72.116 
504 |a Baumann, F.H., Chopp, D.L., De La Rubia, T.D., Gilmer, G.H., Greene, J.E., Huang, H., Kodambaka, S., Petrov, I., (2001) MRS Bull., 26 (3), p. 182. , MRSBEA 0883-7694 
504 |a Barabasi, A.L., Stanley, H.E., (1995) Fractal Concepts in Surface Growth, , Cambridge University Press, Cambridge, U.K 
504 |a Meakin, P., (1998) Fractals, Scaling and Growth Far from Equilibrium, , Cambridge University Press, Cambridge, U.K 
504 |a Castez, M.F., Blum, B., Salvarezza, R.C., Solari, H.G., (2003) Phys. Rev. E, 67, p. 061605. , PLEEE8 1063-651X 10.1103/PhysRevE.67.061605 
504 |a Andreasen, G., Schilardi, P.L., Azzaroni, O., Salvarezza, R.C., (2002) Langmuir, 18, p. 10430. , LANGD5 0743-7463 10.1021/la026262r 
504 |a Kan, H.C., Shah, S., Tadyyon-Eslami, T.T., Phaneuf, R.J., (2004) Phys. Rev. Lett., 92, p. 146101. , PRLTAO 0031-9007 10.1103/PhysRevLett.92.146101 
504 |a Drotar, J.T., Zhao, Y.P., Lu, T.M., Wang, G.C., (2001) Phys. Rev. B, 64, p. 125411. , PRBMDO 0163-1829 10.1103/PhysRevB.64.125411 
504 |a Chattopadhyay, A.K., (2002) Phys. Rev. B, 65, p. 041405. , PRBMDO 0163-1829 10.1103/PhysRevB.65.041405 
504 |a Bales, G.S., Zangwill, A., (1989) Phys. Rev. Lett., 63, p. 692. , PRLTAO 0031-9007 10.1103/PhysRevLett.63.692 
504 |a Karunasiri, R.P.U., Bruinsma, R., Rudnick, J., (1989) Phys. Rev. Lett., 62, p. 788. , PRLTAO 0031-9007 10.1103/PhysRevLett.62.788 
504 |a Roland, C., Guo, H., (1991) Phys. Rev. Lett., 66, p. 2104. , PRLTAO 0031-9007 10.1103/PhysRevLett.66.2104 
504 |a Drotar, J.T., Zhao, Y.P., Lu, T.M., Wang, G.C., (2000) Phys. Rev. B, 62, p. 2118. , PRBMDO 0163-1829 10.1103/PhysRevB.62.2118 
504 |a Mullins, W.W., (1957) J. Appl. Phys., 28, p. 333. , JAPIAU 0021-8979 10.1063/1.1722742 
504 |a Mullins, W.W., (1959) J. Appl. Phys., 30, p. 77. , JAPIAU 0021-8979 10.1063/1.1734979 
504 |a Lapujoulade, J., (1994) Surf. Sci. Rep., 20, p. 191. , SSREDI 0167-5729 10.1016/0167-5729(94)90004-3 
504 |a Ethier, S.N., Kurtz, T.G., (1986) Markov Processes, , Wiley, New York 
504 |a Aparicio, J.P., Solari, H.G., (2001) Phys. Rev. Lett., 86, p. 4183. , PRLTAO 0031-9007 10.1103/PhysRevLett.86.4183 
504 |a Solari, H.G., Natiello, M.A., (2003) Phys. Rev. E, 67, p. 031918. , PLEEE8 1063-651X 10.1103/PhysRevE.67.031918 
504 |a Solari, H., Natiello, M., (2003) Mathematical Modelling in Physics, Engineering and Cognitive Sciences, 6, pp. 79-94. , edited by A. Khrennikov, Proceedings of the Workshop Dynamical Systems from Number Theory to Probability-2. Vol. Växjö University Press, Växjö 
504 |a Meakin, P., (1993) Phys. Rep., 235, p. 189. , PRPLCM 0370-1573 10.1016/0370-1573(93)90047-H 
504 |a Sneddon, I.N., (1957) Elements of Partial Differential Equations, , McGraw-Hill, New York 
504 |a Torres, C.S., (2004) Alternative Lithography: Unleashing the Potentials of Nanotechnology, , Plenum Press, New York 
504 |a Son, C.-S., Kim, T., Wang, X.-L., Ogura, M., (2000) J. Cryst. Growth, 221, p. 201. , JCRGAE 0022-0248 10.1016/S0022-0248(00)00686-2 
504 |a Tsurumachi, N., Son, C.-S., Kim, T., Ogura, M., (2002) J. Cryst. Growth, 237, p. 1486. , JCRGAE 0022-0248 10.1016/S0022-0248(01)02359-4 
504 |a Castez, M.F., Fonticelli, M.H., Azzaroni, O., Salvarezza, R.C., Solari, H.G., (2005) Appl. Phys. Lett., 87, p. 123104. , APPLAB 0003-6951 10.1063/1.2053368 
504 |a Rossnagel, S.M., (1998) J. Vac. Sci. Technol. B, 16, p. 2585. , JVTBD9 0734-211X 10.1116/1.590242 
504 |a Ramanamurty, M.V., (2000) Phys. Rev. B, 62, p. 17004. , PRBMDO 0163-1829 10.1103/PhysRevB.62.17004 
504 |a Das Sarma, S., Tamborenea, P., (1991) Phys. Rev. Lett., 66, p. 325. , PRLTAO 0031-9007 10.1103/PhysRevLett.66.325 
504 |a Dubson, M.A., Jeffers, G., (1994) Phys. Rev. B, 49, p. 8347. , PRBMDO 0163-1829 10.1103/PhysRevB.49.8347 
504 |a Von Seggern, D., (1993) CRC Standard Curves and Surfaces, , CRC Press, Boca Raton, FL 
504 |a Hecht, E., Zajac, A., (1974) Optics, , Addison-Wesley, Reading, MA 
504 |a Higgins, A.L., (1922) The Transition Spiral, , Van Nostrand, New York 
504 |a (1970) Handbook of Mathematical Functions, , edited by M. Abramowitz and I. A. Stegun (Dover, New York 
520 3 |a We propose a (1+1) -dimensional mesoscopic model to describe the most relevant physical processes that take place while depositing and/or annealing micro- and nanopatterned solid substrates. The model assumes that a collimated incident beam impinges over the growing substrate; scattering effects in the vapor and reemission processes are introduced in a phenomenological way as an isotropic flow. Surface diffusion is included as the main relaxation process at the micro- or nanoscale. The stochastic model is built following population dynamics considerations; both stochastic simulations and the deterministic limit are analyzed. Numerical aspects regarding its implementation are also discussed. We study the shape-preserving growth mode, the coupling between shadowing effects and random fluctuations, and the spatial structure of noises using numerical simulations. We report important deviations from linear theories of surface diffusion when the interfaces are not compatible with the small slope approximation, including spontaneous formation of overhangs and nonexponential decay of pattern amplitudes. We discuss the dependence of stationary states with respect to the boundary conditions imposed on the system. © 2006 The American Physical Society.  |l eng 
593 |a Instituto de Investigaciones Fisicoquímicas Teóricas y Aplicadas (INIFTA), UNLP, CONICET, Casilla de Correo 16, Sucursal 4, (1900) La Plata, Argentina 
593 |a Departamento de Física, Universidad de Buenos Aires, Ciudad Universitaria, Pabellón I, (1428) Buenos Aires, Argentina 
690 1 0 |a COMPUTER SIMULATION 
690 1 0 |a DIFFUSION 
690 1 0 |a INTERFACES (MATERIALS) 
690 1 0 |a RANDOM PROCESSES 
690 1 0 |a RAPID THERMAL ANNEALING 
690 1 0 |a RELAXATION PROCESSES 
690 1 0 |a SUBSTRATES 
690 1 0 |a NANOPATTERNED SOLID SUBSTRATES 
690 1 0 |a POPULATION DYNAMICS 
690 1 0 |a SPATIAL STRUCTURES 
690 1 0 |a NANOSTRUCTURED MATERIALS 
700 1 |a Salvarezza, R.C. 
700 1 |a Solari, H.G. 
773 0 |d 2006  |g v. 73  |k n. 1  |p Phys. Rev. E Stat. Nonlinear Soft Matter Phys.  |x 15393755  |t Physical Review E - Statistical, Nonlinear, and Soft Matter Physics 
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856 4 0 |u https://doi.org/10.1103/PhysRevE.73.011607  |y DOI 
856 4 0 |u https://hdl.handle.net/20.500.12110/paper_15393755_v73_n1_p_Castez  |y Handle 
856 4 0 |u https://bibliotecadigital.exactas.uba.ar/collection/paper/document/paper_15393755_v73_n1_p_Castez  |y Registro en la Biblioteca Digital 
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963 |a VARI 
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