Integration of Functional Oxides with Semiconductors
This unique book describes the basic physical principles of the oxide/semiconductor epitaxy and offers a view of the current state of the field. It shows how this technology enables large-scale integration of oxide electronic and photonic devices, and describes possible hybrid semiconductor/oxide sy...
Guardado en:
| Autor principal: | |
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| Otros Autores: | |
| Formato: | Libro electrónico |
| Lenguaje: | Inglés |
| Publicado: |
New York, NY :
Springer New York : Imprint: Springer,
2014.
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| Materias: | |
| Acceso en línea: | http://dx.doi.org/10.1007/978-1-4614-9320-4 |
| Aporte de: | Registro referencial: Solicitar el recurso aquí |
| LEADER | 03075Cam#a22004695i#4500 | ||
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| 020 | |a 9781461493204 | ||
| 024 | 7 | |a 10.1007/978-1-4614-9320-4 |2 doi | |
| 050 | 4 | |a TK7800-8360 | |
| 050 | 4 | |a TK7874-7874.9 | |
| 072 | 7 | |a TJF |2 bicssc | |
| 072 | 7 | |a TEC008000 |2 bisacsh | |
| 072 | 7 | |a TEC008070 |2 bisacsh | |
| 100 | 1 | |a Demkov, Alexander A. |9 260218 | |
| 245 | 1 | 0 | |a Integration of Functional Oxides with Semiconductors |h [libro electrónico] / |c by Alexander A. Demkov, Agham B. Posadas. |
| 260 | 1 | |a New York, NY : |b Springer New York : |b Imprint: Springer, |c 2014. | |
| 300 | |a x, 278 p. : |b il. | ||
| 336 | |a text |b txt |2 rdacontent | ||
| 337 | |a computer |b c |2 rdamedia | ||
| 338 | |a online resource |b cr |2 rdacarrier | ||
| 347 | |a text file |b PDF |2 rda | ||
| 505 | 0 | |a Introduction -- Critical issues in Oxide-Semiconductor Heteroepitaxy -- Predictive Engineering of Semiconductor-Oxide Interfaces -- Crystalline Functional Oxide Growth Methods -- Thin Oxide Film Characterization Methods -- Growing SrTiO3 on Si (001) by Molecular Beam Epitaxy -- Integration of Functional Oxides on SrTiO3/Si Pseudo-Substrates -- Other Epitaxial Oxides on Semiconductors -- Outlook and Parting Thoughts -- Appendices. | |
| 520 | |a This unique book describes the basic physical principles of the oxide/semiconductor epitaxy and offers a view of the current state of the field. It shows how this technology enables large-scale integration of oxide electronic and photonic devices, and describes possible hybrid semiconductor/oxide systems. The book incorporates both theoretical and experimental advances to explore the heteroepitaxy of tuned functional oxides and semiconductors to identify material, device and characterization challenges, and to present the incredible potential in the realization of multifunctional devices and monolithic integration of materials and devices. This book also: ·        Discusses why semiconductor substrates are an excellent integration platform for making hybrid logic/sensor devices ·        Provides a brief introduction to the methods accessible to non-experts, before going into details of interest to the experts ·        Includes a detailed glossary that explains the specialized terminology and provides insight into the terminology and how itâ_Ts used. | ||
| 650 | 0 | |a Engineering. |9 259622 | |
| 650 | 0 | |a Semiconductors. |9 259967 | |
| 650 | 0 | |a Electronics. |9 259648 | |
| 650 | 0 | |a Microelectronics. |9 259649 | |
| 650 | 0 | |a Optical materials. |9 259680 | |
| 650 | 0 | |a Electronic materials. |9 259681 | |
| 650 | 2 | 4 | |a Instrumentation. |9 259652 |
| 700 | 1 | |a Posadas, Agham B. |9 260219 | |
| 776 | 0 | 8 | |i Printed edition: |z 9781461493198 |
| 856 | 4 | 0 | |u http://dx.doi.org/10.1007/978-1-4614-9320-4 |
| 912 | |a ZDB-2-ENG | ||
| 929 | |a COM | ||
| 942 | |c EBK |6 _ | ||
| 950 | |a Engineering (Springer-11647) | ||
| 999 | |a SKV |c 27565 |d 27565 | ||