Integration of Functional Oxides with Semiconductors

This unique book describes the basic physical principles of the oxide/semiconductor epitaxy and offers a view of the current state of the field. It shows how this technology enables large-scale integration of oxide electronic and photonic devices, and describes possible hybrid semiconductor/oxide sy...

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Detalles Bibliográficos
Autor principal: Demkov, Alexander A.
Otros Autores: Posadas, Agham B.
Formato: Libro electrónico
Lenguaje:Inglés
Publicado: New York, NY : Springer New York : Imprint: Springer, 2014.
Materias:
Engineering.
Semiconductors.
Electronics.
Microelectronics.
Optical materials.
Electronic materials.
Instrumentation.
Acceso en línea:http://dx.doi.org/10.1007/978-1-4614-9320-4
Aporte de:Registro referencial: Solicitar el recurso aquí
Bibliotecas (ING-UNLP) de Universidad Nacional de La Plata
Tabla de Contenidos:
  • Introduction
  • Critical issues in Oxide-Semiconductor Heteroepitaxy
  • Predictive Engineering of Semiconductor-Oxide Interfaces
  • Crystalline Functional Oxide Growth Methods
  • Thin Oxide Film Characterization Methods
  • Growing SrTiO3 on Si (001) by Molecular Beam Epitaxy
  • Integration of Functional Oxides on SrTiO3/Si Pseudo-Substrates
  • Other Epitaxial Oxides on Semiconductors
  • Outlook and Parting Thoughts
  • Appendices.

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