Nanopatterning and nanomachining with table-top extreme ultraviolet lasers

por Marconi, M.C., Wachulak, P.W., Capeluto, M.G., Vaschenko, G., Bravo, H., Menoni, C.S., Rocca, J., Anderson, E.H., Chao, W., Attwood, D., Hemberg, O., Frazer, B., Bloom, S.