NanoPatterning Extreme ultraviolet lasers 6 Interferometric lithography 6 Interferometry 6 Laboratory environment 6 Nanopatterning 6 Ultraviolet lasers 6 Capillary discharge lasers 4 EUV lasers 4 Electron beam lithography 4 Extreme ultraviolet lithography 4 Full width half maximum 4 Hydrogen silsesquioxane 4 Nanotechnology 4 Photoresist 4 Photoresists 4 Polymethyl methacrylates 4 Compact EUV lasers 2 Directed assembly 2 Electron device manufacture 2 Extreme Ultraviolet 2 Extreme ultraviolet (EUV) lasers 2 Gold 2 Gold nanoparticle 2 High brightness 2 Lithography 2 Nanomagnetics 2 Nanoparticles 2 Nanostructured materials 2 Optical force 2