Full width half maximum Capillary discharge lasers 4 EUV lasers 4 Electron beam lithography 4 Extreme ultraviolet lasers 4 Extreme ultraviolet lithography 4 Hydrogen silsesquioxane 4 Interferometric lithography 4 Interferometry 4 Laboratory environment 4 NanoPatterning 4 Nanopatterning 4 Nanotechnology 4 Photoresist 4 Photoresists 4 Polymethyl methacrylates 4 Ultraviolet lasers 4 Correlation methods 2 Crystallization 2 Integrated response 2 Nuclear magnetic resonance 2 Oils and fats 2 Signal to noise ratio 2 Solid fat content 2 Spectrometry 2 Time of flight 2 Ultrasonic velocity 2 p-NMR 2