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Amorphous carbon
2
Amorphous carbon layer
2
Amorphous films
2
Carbon films
2
Depth-resolved
Etching
2
Etching process
2
Etching rate
2
Mass spectrometry
2
Raman measurements
2
Raman spectroscopy
2
Secondary ion mass spectrometry
2
Stainless steel
2
Structural information
2
Visible Raman Spectroscopy
2
X ray photoelectron spectroscopy
2
XPS measurements
2
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2