Capillary discharge lasers Interferometry 6 EUV lasers 4 Electron beam lithography 4 Extreme ultraviolet lasers 4 Extreme ultraviolet lithography 4 Full width half maximum 4 Hydrogen silsesquioxane 4 Interferometric lithography 4 Laboratory environment 4 NanoPatterning 4 Nanopatterning 4 Nanotechnology 4 Photoresist 4 Photoresists 4 Polymethyl methacrylates 4 Ultraviolet lasers 4 Carrier concentration 2 Charge coupled devices 2 Dense laser-created plasma 2 Plasma diagnostics 2 Soft X-ray interferometry 2 Soft X-ray lasers 2 X ray lasers 2 X-ray interferograms 2