Materias dentro de su búsqueda.
Materias dentro de su búsqueda.
Interferometry
Extreme ultraviolet lasers
3
Interferometric lithography
3
EUV lasers
2
Extreme ultraviolet lithography
2
Hydrogen silsesquioxane
2
Laboratory environment
2
NanoPatterning
2
Nanopatterning
2
Nanotechnology
2
Photoresists
2
Polymethyl methacrylates
2
Ultraviolet lasers
2
Ultraviolet radiation
2
Capillary discharge lasers
1
Compact EUV lasers
1
Electron beam lithography
1
Extreme Ultraviolet
1
Extreme ultraviolet (EUV) lasers
1
Full width half maximum
1
High brightness
1
High resolution electron microscopy
1
Lasers
1
Lithography
1
Nanoscale patterning
1
Optical tables
1
Pattern recognition
1
Photolithography
1
Photoresist
1
Spatial and temporal coherence
1
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1Materias: “...Nanoscale patterning...”
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2por Capeluto, M.G., Vaschenko, G., Grisham, M., Marconi, M.C., Ludueña, S., Pietrasanta, L., Lu, Y., Parkinson, B., Menoni, C.S., Rocca, J.J.Materias: “...Pattern recognition...”
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3por Wachulak, P.W., Urbanski, L., Capeluto, M.G., Hill, D., Rockward, W.S., Iemmi, C., Anderson, E.H., Menoni, C.S., Rocca, J.J., Marconi, M.C.Materias: “...NanoPatterning...”
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4Materias: “...NanoPatterning...”
JOUR