A micrograting sensor for DNA hybridization and antibody human serum Albumin-Antigen human serum albumin interaction experiments
A biosensor structure comprising silicon nitride (Si3N 4) micrograting arrays coated with a spin-on-glass (SOG) material was investigated. This grating structure was located on a silicon groove, which was etched by a deep reactive ion etching (DRIE) process. The biosensor was used as a specific dete...
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Autores principales: | , , , , , , |
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Formato: | JOUR |
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Acceso en línea: | http://hdl.handle.net/20.500.12110/paper_00214922_v50_n1PART3_p_Chathirat |
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