Microtransfer molding using metallic stamps

This paper describes the fabrication of patterned polymeric microstructures by a transfer molding method. We use alkanethiolate-modified metallic molds that allow pattern transfer with 100 nm resolution. Rigid metallic molds avoid the typical pattern deformations observed when elastomeric molds are...

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Autores principales: Schilardi, Patricia Laura, Azzaroni, Omar, Salvarezza, Roberto Carlos
Formato: Articulo
Lenguaje:Inglés
Publicado: 2003
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Acceso en línea:http://sedici.unlp.edu.ar/handle/10915/175795
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Sumario:This paper describes the fabrication of patterned polymeric microstructures by a transfer molding method. We use alkanethiolate-modified metallic molds that allow pattern transfer with 100 nm resolution. Rigid metallic molds avoid the typical pattern deformations observed when elastomeric molds are employed. The alkanethiolate layer changes the adherence properties of molds enabling an easy release, even for high adherent polymeric materials.