Cita APA (7a ed.)

Society of Photo-optical Instrumentation Engineers. (1992). Microlithography world. Penn Well Publication, published in cooperation with SPIE.

Cita Chicago Style (17a ed.)

Society of Photo-optical Instrumentation Engineers. Microlithography World. Port Washington, N.Y.: Penn Well Publication, published in cooperation with SPIE, 1992.

Cita MLA (8a ed.)

Society of Photo-optical Instrumentation Engineers. Microlithography World. Penn Well Publication, published in cooperation with SPIE, 1992.